Reactive sputtered TiO2thin film humidity sensor with negative substrate bias

L. L W Chow, M. M F Yuen, Philip Ching Ho Chan, A. T. Cheung

Research output: Journal article publicationConference articleAcademic researchpeer-review

94 Citations (Scopus)

Abstract

This study has demonstrated a simple fabrication process of a thin film ceramic relative humidity sensing chip at low temperature, 500°C. This process window to optimize sensitivity and hysteresis performance of the sensor has been studied using negative sputtering substrate bias and annealing duration. This proposed optimizing method yields an adjustable rutile/anatase phase ratio of titanium oxide. It shows improvement to the hysteresis of sensors and obtains good sensitivity, which is greater than four-orders of magnitude change in dc current over 11-97% relative humidity.
Original languageEnglish
Pages (from-to)310-315
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume76
Issue number1-3
DOIs
Publication statusPublished - 1 Jun 2001
Externally publishedYes
EventProceeding of the 8th International Meeting on Chemical Sensors - Basel, Switzerland
Duration: 2 Jul 20005 Jul 2000

Keywords

  • Anatase
  • Bias sputtering
  • Humidity sensors
  • Hysteresis
  • Rutile
  • Titanium oxide

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

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