Reactive sputtered TiO2thin film humidity sensor with negative substrate bias

L. L W Chow; M. M F Yuen; Philip Ching Ho Chan; A. T. Cheung

doi:10.1016/S0925-4005(01)00602-5

Reactive sputtered TiO₂thin film humidity sensor with negative substrate bias

L. L W Chow, M. M F Yuen, Philip Ching Ho Chan, A. T. Cheung

Research output: Journal article publication › Conference article › Academic research › peer-review

100 Citations (Scopus)

Abstract

This study has demonstrated a simple fabrication process of a thin film ceramic relative humidity sensing chip at low temperature, 500°C. This process window to optimize sensitivity and hysteresis performance of the sensor has been studied using negative sputtering substrate bias and annealing duration. This proposed optimizing method yields an adjustable rutile/anatase phase ratio of titanium oxide. It shows improvement to the hysteresis of sensors and obtains good sensitivity, which is greater than four-orders of magnitude change in dc current over 11-97% relative humidity.

Original language	English
Pages (from-to)	310-315
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	76
Issue number	1-3
DOIs	https://doi.org/10.1016/S0925-4005(01)00602-5
Publication status	Published - 1 Jun 2001
Externally published	Yes
Event	Proceeding of the 8th International Meeting on Chemical Sensors - Basel, Switzerland Duration: 2 Jul 2000 → 5 Jul 2000

Keywords

Anatase
Bias sputtering
Humidity sensors
Hysteresis
Rutile
Titanium oxide

ASJC Scopus subject areas

Analytical Chemistry
Electrochemistry
Electrical and Electronic Engineering

More information

10.1016/S0925-4005(01)00602-5

Cite this

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title = "Reactive sputtered TiO2thin film humidity sensor with negative substrate bias",

abstract = "This study has demonstrated a simple fabrication process of a thin film ceramic relative humidity sensing chip at low temperature, 500°C. This process window to optimize sensitivity and hysteresis performance of the sensor has been studied using negative sputtering substrate bias and annealing duration. This proposed optimizing method yields an adjustable rutile/anatase phase ratio of titanium oxide. It shows improvement to the hysteresis of sensors and obtains good sensitivity, which is greater than four-orders of magnitude change in dc current over 11-97% relative humidity.",

keywords = "Anatase, Bias sputtering, Humidity sensors, Hysteresis, Rutile, Titanium oxide",

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AU - Chow, L. L W

AU - Yuen, M. M F

AU - Chan, Philip Ching Ho

AU - Cheung, A. T.

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Y1 - 2001/6/1

N2 - This study has demonstrated a simple fabrication process of a thin film ceramic relative humidity sensing chip at low temperature, 500°C. This process window to optimize sensitivity and hysteresis performance of the sensor has been studied using negative sputtering substrate bias and annealing duration. This proposed optimizing method yields an adjustable rutile/anatase phase ratio of titanium oxide. It shows improvement to the hysteresis of sensors and obtains good sensitivity, which is greater than four-orders of magnitude change in dc current over 11-97% relative humidity.

AB - This study has demonstrated a simple fabrication process of a thin film ceramic relative humidity sensing chip at low temperature, 500°C. This process window to optimize sensitivity and hysteresis performance of the sensor has been studied using negative sputtering substrate bias and annealing duration. This proposed optimizing method yields an adjustable rutile/anatase phase ratio of titanium oxide. It shows improvement to the hysteresis of sensors and obtains good sensitivity, which is greater than four-orders of magnitude change in dc current over 11-97% relative humidity.

KW - Anatase

KW - Bias sputtering

KW - Humidity sensors

KW - Hysteresis

KW - Rutile

KW - Titanium oxide

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DO - 10.1016/S0925-4005(01)00602-5

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JO - Sensors and Actuators, B: Chemical

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T2 - Proceeding of the 8th International Meeting on Chemical Sensors

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