@inproceedings{1e277245ff4e4dcda907b45abad41849,
title = "Rapidly identify the critical parameter of mems device based on element model library",
abstract = "The purpose of this paper is to introduce a simplified yet efficient method to identify the critical parameter of MEMS device based on rapid computer experiments instead of expensive physical experiments. The prototype model of MEMS device is rapidly established by connecting reusable and parameterized element models based on developed element model library. Critical parameters are identified and optimal parameter assemblies are obtained using Taguchi method based on computational experiments of the prototype model. A typical MEMS device-micro resonator is used for demonstrating the design methodology. The method enables the designer to rapidly identify critical parameter of a new MEMS device in early stage of design.",
keywords = "Critical parameter, Element model library, MEMS",
author = "Yang He and Chengyu Jiang and Weizheng Yuan and Yung, {Kai Leung} and Yan Xu",
year = "2011",
month = aug,
day = "1",
doi = "10.4028/www.scientific.net/KEM.483.684",
language = "English",
isbn = "9783037851753",
series = "Key Engineering Materials",
pages = "684--689",
booktitle = "MEMS/NEMS Nano Technology",
note = "12th Annual Conference of the Chinese Society of Micro-Nano Technology, CSMNT and 2nd International Conference of Chinese Society of Micro-Nano Technology ; Conference date: 22-10-2010 Through 24-10-2010",
}