Rapidly identify the critical parameter of mems device based on element model library

Yang He, Chengyu Jiang, Weizheng Yuan, Kai Leung Yung, Yan Xu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

The purpose of this paper is to introduce a simplified yet efficient method to identify the critical parameter of MEMS device based on rapid computer experiments instead of expensive physical experiments. The prototype model of MEMS device is rapidly established by connecting reusable and parameterized element models based on developed element model library. Critical parameters are identified and optimal parameter assemblies are obtained using Taguchi method based on computational experiments of the prototype model. A typical MEMS device-micro resonator is used for demonstrating the design methodology. The method enables the designer to rapidly identify critical parameter of a new MEMS device in early stage of design.
Original languageEnglish
Title of host publicationMEMS/NEMS Nano Technology
Pages684-689
Number of pages6
DOIs
Publication statusPublished - 1 Aug 2011
Event12th Annual Conference of the Chinese Society of Micro-Nano Technology, CSMNT and 2nd International Conference of Chinese Society of Micro-Nano Technology - Xi'an, China
Duration: 22 Oct 201024 Oct 2010

Publication series

NameKey Engineering Materials
Volume483
ISSN (Print)1013-9826

Conference

Conference12th Annual Conference of the Chinese Society of Micro-Nano Technology, CSMNT and 2nd International Conference of Chinese Society of Micro-Nano Technology
CountryChina
CityXi'an
Period22/10/1024/10/10

Keywords

  • Critical parameter
  • Element model library
  • MEMS

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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