Rapid synthesis of MEMS devices based on element model library and metamodel

Yang He; Chengyu Jiang; Kai Leung Yung; Yan Xu; Weizheng Yuan

doi:10.1109/NEMS.2010.5592221

Rapid synthesis of MEMS devices based on element model library and metamodel

Yang He, Chengyu Jiang, Kai Leung Yung, Yan Xu, Weizheng Yuan

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

A rapid virtual prototype synthesis method for MEMS devices based on element model library and metamodel is proposed in this paper. The goal of the approach is to help designers to establish virtual prototypes of new MEMS devices and find the optimal parameters in a short time. In the proposed method, the virtual prototype is established by connecting reusable and parameterized element models in a Multi-Port-Element-Network element model library. The optimal parameters are obtained based on the metamodel derived by uniform design and regression method. The design processes of two typical MEMS devices - micro gyroscope and micro resonator are presented for demonstrating the convenience of the new methodology. The proposed method provides designers a faster way of prototyping of new MEMS devices that is especially advantageous in the early stage of design.

Original language	English
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages	301-305
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2010.5592221
Publication status	Published - 29 Nov 2010
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: 20 Jan 2010 → 23 Jan 2010

Conference

Conference	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/Territory	China
City	Xiamen
Period	20/01/10 → 23/01/10

Keywords

Element model library
MEMS
Metamodel
Synthesis

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

More information

10.1109/NEMS.2010.5592221

Cite this

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title = "Rapid synthesis of MEMS devices based on element model library and metamodel",

abstract = "A rapid virtual prototype synthesis method for MEMS devices based on element model library and metamodel is proposed in this paper. The goal of the approach is to help designers to establish virtual prototypes of new MEMS devices and find the optimal parameters in a short time. In the proposed method, the virtual prototype is established by connecting reusable and parameterized element models in a Multi-Port-Element-Network element model library. The optimal parameters are obtained based on the metamodel derived by uniform design and regression method. The design processes of two typical MEMS devices - micro gyroscope and micro resonator are presented for demonstrating the convenience of the new methodology. The proposed method provides designers a faster way of prototyping of new MEMS devices that is especially advantageous in the early stage of design.",

keywords = "Element model library, MEMS, Metamodel, Synthesis",

author = "Yang He and Chengyu Jiang and Yung, {Kai Leung} and Yan Xu and Weizheng Yuan",

year = "2010",

month = nov,

day = "29",

doi = "10.1109/NEMS.2010.5592221",

language = "English",

isbn = "9781424465439",

pages = "301--305",

booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",

note = "5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 ; Conference date: 20-01-2010 Through 23-01-2010",

}

He, Y, Jiang, C, Yung, KL, Xu, Y & Yuan, W 2010, Rapid synthesis of MEMS devices based on element model library and metamodel. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592221, pp. 301-305, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 20/01/10. https://doi.org/10.1109/NEMS.2010.5592221

Rapid synthesis of MEMS devices based on element model library and metamodel. / He, Yang; Jiang, Chengyu; Yung, Kai Leung et al.
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 301-305 5592221.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Rapid synthesis of MEMS devices based on element model library and metamodel

AU - He, Yang

AU - Jiang, Chengyu

AU - Yung, Kai Leung

AU - Xu, Yan

AU - Yuan, Weizheng

PY - 2010/11/29

Y1 - 2010/11/29

N2 - A rapid virtual prototype synthesis method for MEMS devices based on element model library and metamodel is proposed in this paper. The goal of the approach is to help designers to establish virtual prototypes of new MEMS devices and find the optimal parameters in a short time. In the proposed method, the virtual prototype is established by connecting reusable and parameterized element models in a Multi-Port-Element-Network element model library. The optimal parameters are obtained based on the metamodel derived by uniform design and regression method. The design processes of two typical MEMS devices - micro gyroscope and micro resonator are presented for demonstrating the convenience of the new methodology. The proposed method provides designers a faster way of prototyping of new MEMS devices that is especially advantageous in the early stage of design.

AB - A rapid virtual prototype synthesis method for MEMS devices based on element model library and metamodel is proposed in this paper. The goal of the approach is to help designers to establish virtual prototypes of new MEMS devices and find the optimal parameters in a short time. In the proposed method, the virtual prototype is established by connecting reusable and parameterized element models in a Multi-Port-Element-Network element model library. The optimal parameters are obtained based on the metamodel derived by uniform design and regression method. The design processes of two typical MEMS devices - micro gyroscope and micro resonator are presented for demonstrating the convenience of the new methodology. The proposed method provides designers a faster way of prototyping of new MEMS devices that is especially advantageous in the early stage of design.

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KW - MEMS

KW - Metamodel

KW - Synthesis

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Rapid synthesis of MEMS devices based on element model library and metamodel

Abstract

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Keywords

ASJC Scopus subject areas

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