Rapid synthesis of MEMS devices based on element model library and metamodel

Yang He, Chengyu Jiang, Kai Leung Yung, Yan Xu, Weizheng Yuan

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

A rapid virtual prototype synthesis method for MEMS devices based on element model library and metamodel is proposed in this paper. The goal of the approach is to help designers to establish virtual prototypes of new MEMS devices and find the optimal parameters in a short time. In the proposed method, the virtual prototype is established by connecting reusable and parameterized element models in a Multi-Port-Element-Network element model library. The optimal parameters are obtained based on the metamodel derived by uniform design and regression method. The design processes of two typical MEMS devices - micro gyroscope and micro resonator are presented for demonstrating the convenience of the new methodology. The proposed method provides designers a faster way of prototyping of new MEMS devices that is especially advantageous in the early stage of design.
Original languageEnglish
Title of host publication2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages301-305
Number of pages5
DOIs
Publication statusPublished - 29 Nov 2010
Event5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China
Duration: 20 Jan 201023 Jan 2010

Conference

Conference5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/TerritoryChina
CityXiamen
Period20/01/1023/01/10

Keywords

  • Element model library
  • MEMS
  • Metamodel
  • Synthesis

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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