Rapid prototyping of polymer-based MEMS devices using UV YAG laser

Kam Chuen Yung, S. M. Mei, Tai Man Yue

Research output: Journal article publicationJournal articleAcademic researchpeer-review

4 Citations (Scopus)

Abstract

This paper deals with the laser micro processing technology in the fabrication of micro-electro-mechanical system (MEMS) device. A polymer-based capacitive micro accelerometer is designed and modeled in this paper, and is fabricated with laser micromachining and micro patterning technologies. The fabricated micro accelerometer is finally experimentally verified by measuring the shock of a dropping hammer. It is demonstrated that pulsed UV laser micro processing technology provides a quite suitable fabrication method for polymer-based MEMS rapid prototyping and small volume production.
Original languageEnglish
Pages (from-to)1682-1686
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume14
Issue number12
DOIs
Publication statusPublished - 1 Dec 2004

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

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