Rapid prototyping of polymer-based MEMS devices using UV YAG laser

Kam Chuen Yung; S. M. Mei; Tai Man Yue

doi:10.1088/0960-1317/14/12/012

Rapid prototyping of polymer-based MEMS devices using UV YAG laser

Kam Chuen Yung, S. M. Mei, Tai Man Yue

Research output: Journal article publication › Journal article › Academic research › peer-review

6 Citations (Scopus)

Abstract

This paper deals with the laser micro processing technology in the fabrication of micro-electro-mechanical system (MEMS) device. A polymer-based capacitive micro accelerometer is designed and modeled in this paper, and is fabricated with laser micromachining and micro patterning technologies. The fabricated micro accelerometer is finally experimentally verified by measuring the shock of a dropping hammer. It is demonstrated that pulsed UV laser micro processing technology provides a quite suitable fabrication method for polymer-based MEMS rapid prototyping and small volume production.

Original language	English
Pages (from-to)	1682-1686
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	14
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/14/12/012
Publication status	Published - 1 Dec 2004

ASJC Scopus subject areas

Instrumentation
General Materials Science
Mechanics of Materials
Computational Mechanics

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10.1088/0960-1317/14/12/012

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AB - This paper deals with the laser micro processing technology in the fabrication of micro-electro-mechanical system (MEMS) device. A polymer-based capacitive micro accelerometer is designed and modeled in this paper, and is fabricated with laser micromachining and micro patterning technologies. The fabricated micro accelerometer is finally experimentally verified by measuring the shock of a dropping hammer. It is demonstrated that pulsed UV laser micro processing technology provides a quite suitable fabrication method for polymer-based MEMS rapid prototyping and small volume production.

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Rapid prototyping of polymer-based MEMS devices using UV YAG laser

Abstract

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