Abstract
In this paper, we present a novel method for rapidly fabricating polymeric optical whispering-gallery mode (WGM) resonators. A 3D micro-printing technology based on high-power UV light source and high-speed optical spatial modulator (SLM) is developed, and the fabrication and testing of suspended-toroid WGM resonator array are demonstrated in the experiments. The experimental results reveal that the demonstrated method is very flexible and time-saving to quickly fabricate complex WGM resonators.
Original language | English |
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Title of host publication | IEEE-NANO 2015 - 15th International Conference on Nanotechnology |
Publisher | IEEE |
Pages | 1271-1273 |
Number of pages | 3 |
ISBN (Electronic) | 9781467381550 |
DOIs | |
Publication status | Published - 1 Jan 2015 |
Event | 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 - Rome, Italy Duration: 27 Jul 2015 → 30 Jul 2015 |
Conference
Conference | 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 |
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Country/Territory | Italy |
City | Rome |
Period | 27/07/15 → 30/07/15 |
Keywords
- 3D Printing
- Nanofabrication
- NEMS
- Whispering-gallery mode resonators
ASJC Scopus subject areas
- Process Chemistry and Technology
- Electrical and Electronic Engineering
- Ceramics and Composites
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films