Abstract
A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.
| Original language | English |
|---|---|
| Pages (from-to) | 29708-29714 |
| Number of pages | 7 |
| Journal | Optics Express |
| Volume | 23 |
| Issue number | 23 |
| DOIs | |
| Publication status | Published - 16 Nov 2015 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics