Rapid 3D μ-printing of polymer optical whispering-gallery mode resonators

Jushuai Wu, Xin Guo, Aping Zhang, Hwa Yaw Tam

Research output: Journal article publicationJournal articleAcademic researchpeer-review

27 Citations (Scopus)

Abstract

A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.
Original languageEnglish
Pages (from-to)29708-29714
Number of pages7
JournalOptics Express
Volume23
Issue number23
DOIs
Publication statusPublished - 16 Nov 2015

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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