Abstract
A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.
Original language | English |
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Pages (from-to) | 29708-29714 |
Journal | Optics Express |
Volume | 23 |
Issue number | 23 |
DOIs | |
Publication status | Published - Nov 2015 |