Rapid 3D µPrinting of polymer optical whispering-gallery mode resonators

Jushuai Wu, Xin Guo, Aping Zhang, Hwayaw Tam

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

A novel microfabrication method for rapid printing of polymer optical whispering-gallery mode (WGM) resonators is presented. A 3D micro-printing technology based on high-speed optical spatial modulator (SLM) and high-power UV light source is developed to fabricate suspended-disk WGM resonator array using SU-8 photoresist. The optical spectral responses of the fabricated polymer WGM resonators were measured with a biconically tapered optical fiber. Experimental results reveal that the demonstrated method is very flexible and time-saving for rapid fabrication of complex polymer WGM resonators.
Original languageEnglish
Pages (from-to)29708-29714
JournalOptics Express
Volume23
Issue number23
DOIs
Publication statusPublished - Nov 2015

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