Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

Y. H. Cheng, B. K. Tay, Shu Ping Lau, X. Shi, X. L. Qiao, J. G. Chen, Y. P. Wu, C. S. Xie

Research output: Journal article publicationJournal articleAcademic researchpeer-review

29 Citations (Scopus)

Abstract

Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp3C atoms in carbon nitride films. Both C-N bonds and C ≡ N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp3C fraction, and an increase of the sp2C fraction, the sp2C cluster size, the C-N bond fraction and the C ≡ N bond fraction in carbon nitride films.
Original languageEnglish
Pages (from-to)341-345
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Volume73
Issue number3
DOIs
Publication statusPublished - 1 Jan 2001
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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