Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp3C atoms in carbon nitride films. Both C-N bonds and C ≡ N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp3C fraction, and an increase of the sp2C fraction, the sp2C cluster size, the C-N bond fraction and the C ≡ N bond fraction in carbon nitride films.
|Number of pages||5|
|Journal||Applied Physics A: Materials Science and Processing|
|Publication status||Published - 1 Jan 2001|
ASJC Scopus subject areas
- Materials Science(all)