Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

Y. H. Cheng; B. K. Tay; Shu Ping Lau; X. Shi; X. L. Qiao; J. G. Chen; Y. P. Wu; C. S. Xie

doi:10.1007/s003390100725

Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

Y. H. Cheng, B. K. Tay, Shu Ping Lau, X. Shi, X. L. Qiao, J. G. Chen, Y. P. Wu, C. S. Xie

Research output: Journal article publication › Journal article › Academic research › peer-review

33 Citations (Scopus)

Abstract

Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp3C atoms in carbon nitride films. Both C-N bonds and C ≡ N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp3C fraction, and an increase of the sp2C fraction, the sp2C cluster size, the C-N bond fraction and the C ≡ N bond fraction in carbon nitride films.

Original language	English
Pages (from-to)	341-345
Number of pages	5
Journal	Applied Physics A: Materials Science and Processing
Volume	73
Issue number	3
DOIs	https://doi.org/10.1007/s003390100725
Publication status	Published - 1 Jan 2001
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)

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10.1007/s003390100725

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title = "Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam",

abstract = "Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp3C atoms in carbon nitride films. Both C-N bonds and C ≡ N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp3C fraction, and an increase of the sp2C fraction, the sp2C cluster size, the C-N bond fraction and the C ≡ N bond fraction in carbon nitride films.",

author = "Cheng, {Y. H.} and Tay, {B. K.} and Lau, {Shu Ping} and X. Shi and Qiao, {X. L.} and Chen, {J. G.} and Wu, {Y. P.} and Xie, {C. S.}",

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Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam. / Cheng, Y. H.; Tay, B. K.; Lau, Shu Ping et al.
In: Applied Physics A: Materials Science and Processing, Vol. 73, No. 3, 01.01.2001, p. 341-345.

Research output: Journal article publication › Journal article › Academic research › peer-review

TY - JOUR

T1 - Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

AU - Cheng, Y. H.

AU - Tay, B. K.

AU - Lau, Shu Ping

AU - Shi, X.

AU - Qiao, X. L.

AU - Chen, J. G.

AU - Wu, Y. P.

AU - Xie, C. S.

PY - 2001/1/1

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N2 - Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp3C atoms in carbon nitride films. Both C-N bonds and C ≡ N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp3C fraction, and an increase of the sp2C fraction, the sp2C cluster size, the C-N bond fraction and the C ≡ N bond fraction in carbon nitride films.

AB - Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-arc (FCVA) technique combined with a radio-frequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films. The UV Raman spectra can be directly used to determine the sp3C atoms in carbon nitride films. Both C-N bonds and C ≡ N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp3C fraction, and an increase of the sp2C fraction, the sp2C cluster size, the C-N bond fraction and the C ≡ N bond fraction in carbon nitride films.

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DO - 10.1007/s003390100725

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JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

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Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

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