Keyphrases
Room Temperature
100%
X-ray Diffraction Study
100%
Filtered Cathodic Vacuum Arc
100%
Raman Spectroscopy
100%
Substrate Bias
100%
TiAlN Film
100%
Raman Spectra
75%
Deposition Pressure
75%
TiAlN
75%
Film Structure
50%
Transverse Acoustics
50%
Acoustics
25%
Arc Technique
25%
Disordered Phase
25%
X-ray Diffraction Measurement
25%
X-ray Diffraction Spectroscopy
25%
N-phase
25%
X-ray Raman Spectroscopy
25%
Off-plane
25%
Metal-rich
25%
X-ray Diffraction Pattern
25%
Acoustic Mode
25%
TiAl
25%
Face-centered Cubic
25%
Crystallite Size
25%
Pattern Spectrum
25%
Engineering
Deposited Film
100%
Ray Diffraction
100%
Substrate Bias
100%
Room Temperature
100%
Raman Spectra
75%
Face-Centered Cubic
25%
Good Agreement
25%
Acoustic Mode
25%
X-Ray Diffraction Pattern
25%
Physics
Room Temperature
100%
Raman Spectra
100%
X Ray Diffraction
100%
Raman Spectroscopy
100%
Diffraction Pattern
33%
Material Science
Raman Spectroscopy
100%
Film
100%
X-Ray Diffraction
75%
Diffraction Measurement
25%
Diffraction Pattern
25%