| Original language | English |
|---|---|
| Pages | 289-292 |
| Number of pages | 4 |
| Publication status | Published - 2009 |
| Event | International Symposium on Sputtering & Plasma Processes - Duration: 1 Jan 2009 → … |
Conference
| Conference | International Symposium on Sputtering & Plasma Processes |
|---|---|
| Period | 1/01/09 → … |