Properties of LPCVD a-B films are found to depend strongly on substrate temperature Ts. Hardness increases but H content and ESR linewidth (Δ) decrease with increasing Ts. Δ decreases with increasing measuring temperature, T. Narrowing of Δ may be due to the higher charge carrier mobility (and therefore motional narrowing) at higher T.
ASJC Scopus subject areas
- Ceramics and Composites
- Electronic, Optical and Magnetic Materials