Pressure sensor using Nano-opto-mechanical Systems (NOMS)

X. Zhao; J. M. Tsai; H. Cai; X. M. Ji; J. Zhou; M. H. Bao; Y. P. Huang; D. L. Kwang; A. Q. Liu

doi:10.1109/TRANSDUCERS.2011.5969164

Pressure sensor using Nano-opto-mechanical Systems (NOMS)

X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huang, D. L. Kwang, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical output modulation when the pressure is changed from 0 kPa to 250 kPa. The proposed waveguide pressure sensor array has advantages such as high sensitivity (0.128 dB/kPa) and feasibility of mapping the pressure distributions, which result in potential applications such as microphone acoustics sensors and bio-medical sensors.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	1030-1033
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969164
Publication status	Published - Jun 2011
Externally published	Yes
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

Nano-opto-mechanical Systems (NOMS)
optical force
waveguide array

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/TRANSDUCERS.2011.5969164

Cite this

Zhao, X., Tsai, J. M., Cai, H., Ji, X. M., Zhou, J., Bao, M. H., Huang, Y. P., Kwang, D. L., & Liu, A. Q. (2011). Pressure sensor using Nano-opto-mechanical Systems (NOMS). In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 1030-1033). Article 5969164 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969164

@inproceedings{d7d7288b5ef04c4594cf633aefc25115,

title = "Pressure sensor using Nano-opto-mechanical Systems (NOMS)",

abstract = "This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical output modulation when the pressure is changed from 0 kPa to 250 kPa. The proposed waveguide pressure sensor array has advantages such as high sensitivity (0.128 dB/kPa) and feasibility of mapping the pressure distributions, which result in potential applications such as microphone acoustics sensors and bio-medical sensors.",

keywords = "Nano-opto-mechanical Systems (NOMS), optical force, waveguide array",

author = "X. Zhao and Tsai, {J. M.} and H. Cai and Ji, {X. M.} and J. Zhou and Bao, {M. H.} and Huang, {Y. P.} and Kwang, {D. L.} and Liu, {A. Q.}",

year = "2011",

month = jun,

doi = "10.1109/TRANSDUCERS.2011.5969164",

language = "English",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

pages = "1030--1033",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

}

Zhao, X, Tsai, JM, Cai, H, Ji, XM, Zhou, J, Bao, MH, Huang, YP, Kwang, DL & Liu, AQ 2011, Pressure sensor using Nano-opto-mechanical Systems (NOMS). in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969164, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 1030-1033, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969164

Pressure sensor using Nano-opto-mechanical Systems (NOMS). / Zhao, X.; Tsai, J. M.; Cai, H. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1030-1033 5969164 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Zhao, X.

AU - Tsai, J. M.

AU - Cai, H.

AU - Ji, X. M.

AU - Zhou, J.

AU - Bao, M. H.

AU - Huang, Y. P.

AU - Kwang, D. L.

AU - Liu, A. Q.

PY - 2011/6

Y1 - 2011/6

N2 - This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical output modulation when the pressure is changed from 0 kPa to 250 kPa. The proposed waveguide pressure sensor array has advantages such as high sensitivity (0.128 dB/kPa) and feasibility of mapping the pressure distributions, which result in potential applications such as microphone acoustics sensors and bio-medical sensors.

AB - This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical output modulation when the pressure is changed from 0 kPa to 250 kPa. The proposed waveguide pressure sensor array has advantages such as high sensitivity (0.128 dB/kPa) and feasibility of mapping the pressure distributions, which result in potential applications such as microphone acoustics sensors and bio-medical sensors.

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ER -

Zhao X, Tsai JM, Cai H, Ji XM, Zhou J, Bao MH et al. Pressure sensor using Nano-opto-mechanical Systems (NOMS). In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 1030-1033. 5969164. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969164

Pressure sensor using Nano-opto-mechanical Systems (NOMS)

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