Preparation and piezoelectric properties of sol-gel derived niobium-doped lead zirconate titanate films for MEMS applications

Kin Wing Kwok, K.P. Kwok, R.C.W. Tsang, H.L.W. Chan, C.L. Choy

Research output: Unpublished conference presentation (presented paper, abstract, poster)Conference presentation (not published in journal/proceeding/book)Academic researchpeer-review

Original languageEnglish
Number of pages23
Publication statusPublished - 2005
EventInternational Symposium on Integrated Ferroelectrics [ISIF] -
Duration: 1 Jan 2005 → …


ConferenceInternational Symposium on Integrated Ferroelectrics [ISIF]
Period1/01/05 → …

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