Preparation and piezoelectric properties of sol-gel derived niobium-doped lead zirconate titanate films for MEMS applications

Kin Wing Kwok; K.P. Kwok; R.C.W. Tsang; H.L.W. Chan; C.L. Choy

Preparation and piezoelectric properties of sol-gel derived niobium-doped lead zirconate titanate films for MEMS applications

Kin Wing Kwok, K.P. Kwok, R.C.W. Tsang, H.L.W. Chan, C.L. Choy

Research output: Unpublished conference presentation (presented paper, abstract, poster) › Conference presentation (not published in journal/proceeding/book) › Academic research › peer-review

Original language	English
Pages	5-27
Number of pages	23
Publication status	Published - 2005
Event	International Symposium on Integrated Ferroelectrics [ISIF] - Duration: 1 Jan 2005 → …

Conference

Conference	International Symposium on Integrated Ferroelectrics [ISIF]
Period	1/01/05 → …

Cite this

@conference{8c6106223cce4a04a73b516ba509d870,

title = "Preparation and piezoelectric properties of sol-gel derived niobium-doped lead zirconate titanate films for MEMS applications",

author = "Kwok, {Kin Wing} and K.P. Kwok and R.C.W. Tsang and H.L.W. Chan and C.L. Choy",

year = "2005",

language = "English",

pages = "5--27",

note = "International Symposium on Integrated Ferroelectrics [ISIF] ; Conference date: 01-01-2005",

}

Preparation and piezoelectric properties of sol-gel derived niobium-doped lead zirconate titanate films for MEMS applications. / Kwok, Kin Wing; Kwok, K.P.; Tsang, R.C.W. et al.
2005. 5-27 Paper presented at International Symposium on Integrated Ferroelectrics [ISIF].

Research output: Unpublished conference presentation (presented paper, abstract, poster) › Conference presentation (not published in journal/proceeding/book) › Academic research › peer-review

TY - CONF

T1 - Preparation and piezoelectric properties of sol-gel derived niobium-doped lead zirconate titanate films for MEMS applications

AU - Kwok, Kin Wing

AU - Kwok, K.P.

AU - Tsang, R.C.W.

AU - Chan, H.L.W.

AU - Choy, C.L.

PY - 2005

Y1 - 2005

M3 - Conference presentation (not published in journal/proceeding/book)

SP - 5

EP - 27

T2 - International Symposium on Integrated Ferroelectrics [ISIF]

Y2 - 1 January 2005

ER -