Preparation and electric properties of SrBi2Ta2O9thin films by MOD method

Zhigang Zhang, Feng Yan, Jinsong Zhu, Chunhua Song, Xiaobin Chen, Yening Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

6 Citations (Scopus)

Abstract

Polycrystalline SrBi2Ta2O9(SBT) ferroelectric thin films were prepared on Pt/Ti/SiO2/Si substrates by the metalorganic decomposition (MOD) technique. The dielectric properties of SrBi2Ta2O9(SBT) capacitors were measured with HP4194 and RT6000HVS testers. The experimental results exhibited that the dielectric constant εr(f) and ac conductivity σ(f) of SBT thin films had a power law dependence on frequency. An increase in the ac conductivity with increasing frequency showed the relaxation of the leakage current of the SBT capacitors in the first stage. The dielectric constant and ac conductivity were dependent on the thickness, temperature, grain size, and annealing ambient, etc. of the SBT thin films.
Original languageEnglish
Pages (from-to)176-179
Number of pages4
JournalThin Solid Films
Volume375
Issue number1-2
DOIs
Publication statusPublished - 31 Oct 2000
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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