Preparation and characterization of superhard boron-suboxide films

H. Huang, Chung Wo Ong, B. Zheng, R. W.M. Kwok, W. M. Lau, J. W. He

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)


The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.
Original languageEnglish
Pages (from-to)1595-1602
Number of pages8
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number5
Publication statusPublished - 1 Sep 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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