The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.
|Number of pages||8|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 1 Sep 2003|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films