Abstract
The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.
Original language | English |
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Pages (from-to) | 1595-1602 |
Number of pages | 8 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 21 |
Issue number | 5 |
DOIs | |
Publication status | Published - 1 Sept 2003 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films