Preparation and characterization of superhard boron-suboxide films

H. Huang; Chung Wo Ong; B. Zheng; R. W.M. Kwok; W. M. Lau; J. W. He

doi:10.1116/1.1589528

Preparation and characterization of superhard boron-suboxide films

H. Huang, Chung Wo Ong, B. Zheng, R. W.M. Kwok, W. M. Lau, J. W. He

Research output: Journal article publication › Journal article › Academic research › peer-review

10 Citations (Scopus)

Abstract

The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.

Original language	English
Pages (from-to)	1595-1602
Number of pages	8
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	5
DOIs	https://doi.org/10.1116/1.1589528
Publication status	Published - 1 Sep 2003

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

More information

10.1116/1.1589528

Cite this

@article{40caf927e3b54a5da50f00da4d533544,

title = "Preparation and characterization of superhard boron-suboxide films",

abstract = "The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.",

author = "H. Huang and Ong, {Chung Wo} and B. Zheng and Kwok, {R. W.M.} and Lau, {W. M.} and He, {J. W.}",

year = "2003",

month = sep,

day = "1",

doi = "10.1116/1.1589528",

language = "English",

volume = "21",

pages = "1595--1602",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "5",

}

TY - JOUR

T1 - Preparation and characterization of superhard boron-suboxide films

AU - Huang, H.

AU - Ong, Chung Wo

AU - Zheng, B.

AU - Kwok, R. W.M.

AU - Lau, W. M.

AU - He, J. W.

PY - 2003/9/1

Y1 - 2003/9/1

N2 - The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.

AB - The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.

UR - http://www.scopus.com/inward/record.url?scp=0142090639&partnerID=8YFLogxK

U2 - 10.1116/1.1589528

DO - 10.1116/1.1589528

M3 - Journal article

VL - 21

SP - 1595

EP - 1602

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

SN - 0734-2101

IS - 5

ER -

Preparation and characterization of superhard boron-suboxide films

Abstract

ASJC Scopus subject areas

More information

Other files and links

Cite this