Preparation and characterization of superhard boron-suboxide films

H. Huang; Chung Wo Ong; B. Zheng; R. W.M. Kwok; W. M. Lau; J. W. He

doi:10.1116/1.1589528

Preparation and characterization of superhard boron-suboxide films

H. Huang, Chung Wo Ong, B. Zheng, R. W.M. Kwok, W. M. Lau, J. W. He

Research output: Journal article publication › Journal article › Academic research › peer-review

11 Citations (Scopus)

Abstract

The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.

Original language	English
Pages (from-to)	1595-1602
Number of pages	8
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	5
DOIs	https://doi.org/10.1116/1.1589528
Publication status	Published - 1 Sep 2003

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.1589528

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title = "Preparation and characterization of superhard boron-suboxide films",

abstract = "The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.",

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AU - Zheng, B.

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AU - Lau, W. M.

AU - He, J. W.

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AB - The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.

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U2 - 10.1116/1.1589528

DO - 10.1116/1.1589528

M3 - Journal article

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Preparation and characterization of superhard boron-suboxide films

Abstract

ASJC Scopus subject areas

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