Original language | English |
---|---|
Pages (from-to) | 2239-2240 |
Number of pages | 2 |
Journal | Microsystem Technologies |
Volume | 27 |
Issue number | 6 |
DOIs | |
Publication status | Published - Jun 2021 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering