Keyphrases
Stage-based
100%
Tracking Control
100%
Nanopositioning Stage
100%
Prandtl-Ishlinskii Model
100%
Precise Tracking
100%
Non-axisymmetric
25%
Submicron
25%
Feedback Control
25%
Practical Control
25%
Real-time Control
25%
Hysteresis
25%
Weight Parameter
25%
Feedforward Controller
25%
Combined Control
25%
Precise Motion
25%
Model Output
25%
Particle Swarm Optimization
25%
Micro-nano
25%
Feedback Control Algorithm
25%
Piezo-driven
25%
Nanoscale Manipulation
25%
Proportional Integral Derivative
25%
Motion Tracking Control
25%
Motion Tracking
25%
Hysteresis Compensation
25%
Derivative Feedback Control
25%
Micro-positioning Platform
25%
Hysteresis Modeling
25%
Submicron Accuracy
25%
Model-based Feedforward
25%
Engineering
Feedforward
100%
Control Scheme
33%
Combined Control
33%
Sound Basis
33%
Control Algorithm
33%
Nanoscale
33%
Feedforward Control
33%
Particle Swarm Optimization
33%
Feedback Control
33%