Precise tracking control of a piezoactuated micropositioning stage based on modified Prandtl-Ishlinskii hysteresis model

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

8 Citations (Scopus)

Abstract

In this paper, the hysteresis modeling and compensation are carried out and verified for a piezo-driven XY parallel micropositioning stage aiming at a sub-micron precise motion tracking control. Specifically, inverse modified Prandtl-Ishlinskii (MPI) model-based feedforward in combination with a proportional-integral-derivative (PID) feedback control algorithm is implemented for the real-time control. The MPI model is identified by optimizing the weight parameters through particle swarm optimization (PSO) to match the model output to experimental data. For the purpose of comparisons, a feedforward controller using the inverse MPI model solely is realized as well. The performance of feedforward plus feedback over stand-alone feedforward control is examined by experimental studies conducted on the prototype micropositioning stage. Results show that the combined control scheme can reduce the nonsymmetric hysteresis to a negligible level and produce a sub-micron accuracy motion tracking, which provides a sound base of practical control of the micropositioning system for micro/nano scale manipulation.
Original languageEnglish
Title of host publication2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
Pages692-697
Number of pages6
DOIs
Publication statusPublished - 17 Nov 2010
Externally publishedYes
Event2010 IEEE International Conference on Automation Science and Engineering, CASE 2010 - Toronto, ON, Canada
Duration: 21 Aug 201024 Aug 2010

Conference

Conference2010 IEEE International Conference on Automation Science and Engineering, CASE 2010
Country/TerritoryCanada
CityToronto, ON
Period21/08/1024/08/10

ASJC Scopus subject areas

  • Control and Systems Engineering

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