Precise temperature control of microfluidic chamber for gas and liquid phase reactions

Keyphrases

• 3D numerical Simulation 50%
• Bulk Silicon 50%
• Control Algorithm 50%
• Fluidic Chamber 50%
• Fluidic Device 50%
• Gain Scheduling 50%
• Gas-phase Reactions 100%
• Heater 50%
• Integral Scheme 50%
• Liquid-phase Reaction 100%
• Low Power Consumption 50%
• Micro Total Analysis Systems (μTAS) 50%
• Microfluidic Chamber 100%
• Micromachining 50%
• Precise Temperature Control 100%
• Rapid Cooling 50%
• Rapid Heating 50%
• Reaction Chamber 50%
• Silicon Nitride Membrane 50%
• Silicon-based 50%
• Spatial Temperature Distribution 50%
• Temperature Uniformity 50%
• Thermal Characteristics 50%
• Thermal Control 50%
• Thermal Cycling Behavior 50%
• Thin-film Silicon 50%

Engineering

• Bulk Silicon 50%
• Control Algorithm 50%
• Controlled Device 50%
• Data Show 50%
• Fluidics 100%
• Gain-Scheduling 50%
• Gas-Phase 100%
• Good Agreement 50%
• Liquid Phase 100%
• Low Power Consumption 50%
• Micro Total Analysis System 50%
• Nitride 50%
• Phase Reaction 100%
• Rapid Cooling 50%
• Rapid Heating 50%
• Reaction Chamber 50%
• Simulation Result 50%
• Temperature Distribution 50%
• Thermal Characteristic 50%
• Thermal Control 50%

Chemical Engineering

• Micro Total Analysis System 100%
• Silicon Nitride 100%
• Temperature Distribution 100%
• Thermal Cycling 100%