Precise temperature control of microfluidic chamber for gas and liquid phase reactions

Engineering

• Gas-Phase 100%
• Liquid Phase 100%
• Phase Reaction 100%
• Temperature 100%
• Silicon 66%
• Membrane 33%
• Nitride 33%
• Control Algorithm 33%
• Computer Simulation 33%
• Bulk Silicon 33%
• Thermal Characteristic 33%
• Good Agreement 33%
• Simulation Result 33%
• Data Show 33%
• Thermal Control 33%
• Controlled Device 33%
• Low Power Consumption 33%
• Gain-Scheduling 33%
• Reaction Chamber 33%
• Rapid Heating 33%
• Rapid Cooling 33%
• Platinum 33%
• Performance 33%
• Sensor 33%
• Maps 33%
• Demonstrates 33%
• Temperature Distribution 33%

Physics

• Vapor Phase 100%
• Silicon 100%
• Liquid Phases 100%
• Temperature Control 100%
• Simulation 100%
• Feedback 100%
• Fluidics 100%
• Membrane 50%
• Cooling 50%
• Platinum 50%
• Temperature Distribution 50%
• Performance 50%
• Temperature 50%
• Heating 50%
• Micro Total Analysis System 50%

Material Science

• Microfluidics 100%
• Liquid 100%
• Gas 100%
• Temperature 100%
• Devices 75%
• Membrane 25%
• Silicon Nitride 25%
• Thermal Cycling 25%