Precise Patterning of Large-Scale TFT Arrays Based on Solution-Processed Oxide Semiconductors: A Comparative Study of Additive and Subtractive Approaches

Minmin Li, Jiwen Zheng, Huihua Xu, Zhaogui Wang, Qian Wu, Bolong Huang, Hang Zhou, Chuan Liu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

17 Citations (Scopus)

Abstract

Precise patterning of solution-processed oxide semiconductors is critical for cost-effective, large-scale, and high throughput fabrication of circuits and display application. In this paper, demonstration and comparison are made using the additive and subtractive patterning strategies to precisely fabricate wafer-scale thin film transistor arrays (1600 devices), which are based on high-quality solution-processed indium zinc oxide (IZO) and indium gallium zinc oxide (IGZO). The IZO and IGZO TFTs exhibit field-effect mobility up to 8.0 and 5.2 cm 2 V −1 s −1 when using the additive method, whereas the highest mobility of 24.2 and 13.7 cm 2 V −1 s −1 for IZO and IGZO TFTs is achieved when using the subtractive method. The X-ray photoelectronic spectroscopy studies and quantitative 2D device simulations together reveal that good device performance is attributed to moderate shallow donor-like states (providing electrons) from oxygen vacancy and few accepter-like states (trapping electrons) resulted from the dense structural framework of MO bonds. After examining the uniformity and reliability of the devices, the solution-patterned inverters are demonstrated using negative-channel metal oxide semiconductors, which show full swing output transfer characteristics and thus provide a promising method for solution-based fabrications of circuits.

Original languageEnglish
Article number1700981
JournalAdvanced Materials Interfaces
Volume5
Issue number1
DOIs
Publication statusPublished - 9 Jan 2018

Keywords

  • metal oxide semiconductors
  • semiconductor patterning
  • solution-processing
  • thin film transistors

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering

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