Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications

Xuming Zhang; F. Chollet; Fook S. Chau; Chenggen Quan; Ai Q. Liu

doi:10.1117/12.396499

Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications

Xuming Zhang, F. Chollet, Fook S. Chau, Chenggen Quan, Ai Q. Liu

Research output: Journal article publication › Conference article › Academic research › peer-review

4 Citations (Scopus)

Abstract

Two monolithically integrated frequency tuners have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The frequency tuners use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two frequency tuners is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16 nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.

Original language	English
Pages (from-to)	278-287
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4178
DOIs	https://doi.org/10.1117/12.396499
Publication status	Published - Aug 2000
Externally published	Yes
Event	MOEMS and Miniaturized Systems 2000 - Santa Clara, United States Duration: 18 Sept 2000 → 21 Sept 2000

Keywords

And moems
Fiber-optic communication
Frequency tuner
Optical mems
WDM

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.396499

Cite this

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title = "Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications",

abstract = "Two monolithically integrated frequency tuners have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The frequency tuners use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two frequency tuners is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16 nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.",

keywords = "And moems, Fiber-optic communication, Frequency tuner, Optical mems, WDM",

author = "Xuming Zhang and F. Chollet and Chau, {Fook S.} and Chenggen Quan and Liu, {Ai Q.}",

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T1 - Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications

AU - Zhang, Xuming

AU - Chollet, F.

AU - Chau, Fook S.

AU - Quan, Chenggen

AU - Liu, Ai Q.

N1 - Publisher Copyright: © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

PY - 2000/8

Y1 - 2000/8

N2 - Two monolithically integrated frequency tuners have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The frequency tuners use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two frequency tuners is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16 nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.

AB - Two monolithically integrated frequency tuners have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The frequency tuners use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two frequency tuners is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16 nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.

KW - And moems

KW - Fiber-optic communication

KW - Frequency tuner

KW - Optical mems

KW - WDM

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DO - 10.1117/12.396499

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VL - 4178

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EP - 287

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - MOEMS and Miniaturized Systems 2000

Y2 - 18 September 2000 through 21 September 2000

ER -

Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications

Abstract

Keywords

ASJC Scopus subject areas

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