PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

Keyphrases

• Active Elements 33%
• Center Frequency 66%
• Chemical Thinning 33%
• Electromechanical Coupling Coefficient 33%
• Energy Conversion Performance 33%
• High-frequency Ultrasonic Transducer 33%
• Hybrid Processing 33%
• Low Insertion Loss 33%
• Mechanical Lapping 33%
• Micromachined Ultrasound Transducers 100%
• On-Silicon 66%
• Piezoelectric Constant 33%
• PMN-PT 100%
• PMN-PT Crystals 100%
• Processing Methods 33%
• Silicon Micromachining 33%
• Silicon Substrate 100%
• Single-crystalline 33%
• Stainless Steel Needle 33%
• Thick Film 100%
• Transducer Structure 66%
• Wafer 33%
• Wafer Bonding 33%
• Wet Chemical Method 33%

Engineering

• Active Element 20%
• Coupling Coefficient 20%
• Db Bandwidth 20%
• Energy Conversion 20%
• Granulocyte 100%
• Hybrid Processing 20%
• Insertion Loss 20%
• Micro Machining 20%
• Piezoelectric 20%
• Processing Method 20%
• Silicon Substrate 100%
• Silicon Technology 20%
• Silicon Wafer 20%
• Stainless Steel 20%
• Transducer 100%
• Ultrasonics 100%
• Wafer Bonding 20%