PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

Peng Jue, Lau Sienting, Chao Chen, Dai Jiyan, L. W.Chan Helen, Lu Haosu, Q. F. Zhou, K. K. Shun

Research output: Journal article publicationConference articleAcademic researchpeer-review

1 Citation (Scopus)


In this work, a novel high-frequency ultrasonic structure is realized by using PMNPT-on-silicon and silicon micromachining. To prepare the single PMNPT-on-silicon wafers, a hybrid processing involving wafer bonding, mechanical lapping and wet thinning is successfully developed. The active element is within the stainless steel needle housing. The measured frequency and -6 dB bandwidth of the transducer are 35 and 34%, respectively. Owing to the excellent property of PMNPT film, the transducer good energy conversion performance with a very low loss down to 8.3 dB at the center frequency.
Original languageEnglish
Article number4803311
Pages (from-to)161-163
Number of pages3
JournalProceedings - IEEE Ultrasonics Symposium
Publication statusPublished - 1 Dec 2008
Event2008 IEEE International Ultrasonics Symposium, IUS 2008 - Beijing, China
Duration: 2 Nov 20085 Nov 2008

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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