Piezoelectric hydraulic pump with innovative active valves

Dong Gun Lee, Siu Wing Or, Conal O'Neill, Gregory P. Carman

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)


The development of a piezoelectric hydraulic pump with innovative active valves is presented in this study. The pump structure basically consists of a diaphragm type piezoelectric stack actuator and two specially designed unimorph disc valves acting as inlet and delivery valves. Static and dynamic piezoelectric finite element analyses were used to maximize the delivered fluid volume per stroke and to predict the resonance characteristics of the pump, respectively. A structural optimization technique was performed to optimize the efficiency of the pump versus its geometrical dimensions. A transient CFD model was used to predict flow rates. Dynamic experiments were also conducted and results are in good agreement with those obtained from the simulation.
Original languageEnglish
Pages (from-to)530-536
Number of pages7
JournalProceedings of SPIE-The International Society for Optical Engineering
Publication statusPublished - 1 Jan 2002
Externally publishedYes


  • CFD
  • Diaphragm
  • Finite element analyses
  • Piezoelectric hydraulic pump
  • Piezoelectric stack actuator
  • Unimorph disc valves

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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