Piezoelectric coefficients of PZT thin films

R. C.W. Tsang, Kin Wing Kwok, H. L.W. Chan, C. L. Choy

Research output: Journal article publicationJournal articleAcademic researchpeer-review

9 Citations (Scopus)

Abstract

Longitudinal piezoelectric coefficient (d33) and transverse piezoelectric coefficient (e31) of sol-gel derived lead zirconate titanate (PZT) thin films have been measured, d33was measured based on the converse piezoelectric effect using a single beam laser interferometer. Bending of the substrate caused by surface displacement of the PZT film was eliminated by clamping the substrate tightly to a large and rigid platform. e31was measured based on the direct piezoelectric effect using a simple experimental setup. In the measurement, a rectangular PZT film sample (with substrate) was bent in such a way that a longitudinal strain was generated along the length of the sample. The induced current was measured using a lock-in amplifier. This method does not require any expensive equipment and special techniques for preparing the sample. Effects of lead loss and annealing temperature on the piezoelectric properties have been studied.
Original languageEnglish
Pages (from-to)143-148
Number of pages6
JournalIntegrated Ferroelectrics
Volume50
DOIs
Publication statusPublished - 1 Dec 2002

Keywords

  • Longitudinal piezoelectric coefficient d 33
  • PZT films
  • Sol-gel
  • Transverse piezoelectric coefficient 6 31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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