Physical properties of room temperature deposited B-C-N-O films prepared by dual-ion-beam deposition

Chung Wo Ong, Kai Fung Chan, Xin An Zhao, Chung Loong Choy

Research output: Journal article publicationJournal articleAcademic researchpeer-review

19 Citations (Scopus)


B-C-N-O films with various compositions were prepared at room temperature using dual-ion-beam deposition. The films are divided into three groups, with C contents below 10at.%, between 10 and 35at.%, and above 35at.%, respectively. The films of the first group are dominated by the existence of a B-O phase. They have wider optical band gaps Eg, and are therefore more transparent and insulating. The volume fraction of the B-O phase decreases with increasing C content, thereby leading to a drop in the H. The second group of films contains a h-BN phase, and so have smaller Egand higher room temperature conductivity σroom. H rises and approaches that of h-BN when the C content reaches 35at.%. The third group of films contains a large fraction of a graphite phase, which greatly affects the films properties, leading to a further reduction of Egand a rise in σroom. H becomes lower with increasing C content. This work demonstrates that the optical, electrical and mechanical properties of B-C-N-O films can be tailored by adjusting the composition.
Original languageEnglish
Pages (from-to)145-152
Number of pages8
JournalSurface and Coatings Technology
Issue number2-3
Publication statusPublished - 18 Jul 1999


  • B-C-N-O films
  • Ion beam deposition
  • Mechanical properties

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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