@inproceedings{3857ed7b967a404f8d9cd3521009692b,
title = "Photonic thermocouple design based on an ultra-compact michelson interferometer",
abstract = "This paper reports a photonic thermocouple based on an ultra-compact Michelson Interferometer (MI) for on-chip temperature sensing. All components are fabricated by using standard CMOS process. Compared with the traditional temperature sensors based on electronics, this proposed photonics thermocouple has more compact size (40 μm × 70 μm), high sensitivity (113.72 pm/K), cost-effective, and immunity to the electromagnetic interference. The proposed photonic thermocouple has potential applications in harsh environments, such as nuclear power plants and oil-drills.",
keywords = "integrated optics sensor, NEMS, on-chip temperature sensing, Photonic thermocouple",
author = "Tao, \{J. F.\} and H. Cai and Zhang, \{Q. X.\} and Tsai, \{J. M.\} and P. Kropelnicki and Randles, \{A. B.\} and M. Tang and Liu, \{A. Q.\}",
year = "2013",
month = jun,
doi = "10.1109/Transducers.2013.6627281",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "2365--2368",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}