Photonic thermocouple design based on an ultra-compact michelson interferometer

J. F. Tao; H. Cai; Q. X. Zhang; J. M. Tsai; P. Kropelnicki; A. B. Randles; M. Tang; A. Q. Liu

doi:10.1109/Transducers.2013.6627281

Photonic thermocouple design based on an ultra-compact michelson interferometer

J. F. Tao, H. Cai, Q. X. Zhang, J. M. Tsai, P. Kropelnicki, A. B. Randles, M. Tang, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

This paper reports a photonic thermocouple based on an ultra-compact Michelson Interferometer (MI) for on-chip temperature sensing. All components are fabricated by using standard CMOS process. Compared with the traditional temperature sensors based on electronics, this proposed photonics thermocouple has more compact size (40 μm × 70 μm), high sensitivity (113.72 pm/K), cost-effective, and immunity to the electromagnetic interference. The proposed photonic thermocouple has potential applications in harsh environments, such as nuclear power plants and oil-drills.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII
Subtitle of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	2365-2368
Number of pages	4
DOIs	https://doi.org/10.1109/Transducers.2013.6627281
Publication status	Published - Jun 2013
Externally published	Yes
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013

Publication series

Name	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Conference

Conference	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13

Keywords

integrated optics sensor
NEMS
on-chip temperature sensing
Photonic thermocouple

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

More information

10.1109/Transducers.2013.6627281

Cite this

Tao, J. F., Cai, H., Zhang, Q. X., Tsai, J. M., Kropelnicki, P., Randles, A. B., Tang, M., & Liu, A. Q. (2013). Photonic thermocouple design based on an ultra-compact michelson interferometer. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 2365-2368). Article 6627281 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6627281

Tao, J. F. ; Cai, H. ; Zhang, Q. X. et al. / Photonic thermocouple design based on an ultra-compact michelson interferometer. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 2365-2368 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

@inproceedings{3857ed7b967a404f8d9cd3521009692b,

title = "Photonic thermocouple design based on an ultra-compact michelson interferometer",

abstract = "This paper reports a photonic thermocouple based on an ultra-compact Michelson Interferometer (MI) for on-chip temperature sensing. All components are fabricated by using standard CMOS process. Compared with the traditional temperature sensors based on electronics, this proposed photonics thermocouple has more compact size (40 μm × 70 μm), high sensitivity (113.72 pm/K), cost-effective, and immunity to the electromagnetic interference. The proposed photonic thermocouple has potential applications in harsh environments, such as nuclear power plants and oil-drills.",

keywords = "integrated optics sensor, NEMS, on-chip temperature sensing, Photonic thermocouple",

author = "Tao, {J. F.} and H. Cai and Zhang, {Q. X.} and Tsai, {J. M.} and P. Kropelnicki and Randles, {A. B.} and M. Tang and Liu, {A. Q.}",

year = "2013",

month = jun,

doi = "10.1109/Transducers.2013.6627281",

language = "English",

isbn = "9781467359818",

series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

pages = "2365--2368",

booktitle = "2013 Transducers and Eurosensors XXVII",

note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

}

Tao, JF, Cai, H, Zhang, QX, Tsai, JM, Kropelnicki, P, Randles, AB, Tang, M & Liu, AQ 2013, Photonic thermocouple design based on an ultra-compact michelson interferometer. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6627281, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 2365-2368, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627281

Photonic thermocouple design based on an ultra-compact michelson interferometer. / Tao, J. F.; Cai, H.; Zhang, Q. X. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2365-2368 6627281 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Photonic thermocouple design based on an ultra-compact michelson interferometer

AU - Tao, J. F.

AU - Cai, H.

AU - Zhang, Q. X.

AU - Tsai, J. M.

AU - Kropelnicki, P.

AU - Randles, A. B.

AU - Tang, M.

AU - Liu, A. Q.

PY - 2013/6

Y1 - 2013/6

N2 - This paper reports a photonic thermocouple based on an ultra-compact Michelson Interferometer (MI) for on-chip temperature sensing. All components are fabricated by using standard CMOS process. Compared with the traditional temperature sensors based on electronics, this proposed photonics thermocouple has more compact size (40 μm × 70 μm), high sensitivity (113.72 pm/K), cost-effective, and immunity to the electromagnetic interference. The proposed photonic thermocouple has potential applications in harsh environments, such as nuclear power plants and oil-drills.

AB - This paper reports a photonic thermocouple based on an ultra-compact Michelson Interferometer (MI) for on-chip temperature sensing. All components are fabricated by using standard CMOS process. Compared with the traditional temperature sensors based on electronics, this proposed photonics thermocouple has more compact size (40 μm × 70 μm), high sensitivity (113.72 pm/K), cost-effective, and immunity to the electromagnetic interference. The proposed photonic thermocouple has potential applications in harsh environments, such as nuclear power plants and oil-drills.

KW - integrated optics sensor

KW - NEMS

KW - on-chip temperature sensing

KW - Photonic thermocouple

UR - http://www.scopus.com/inward/record.url?scp=84891669808&partnerID=8YFLogxK

U2 - 10.1109/Transducers.2013.6627281

DO - 10.1109/Transducers.2013.6627281

M3 - Conference article published in proceeding or book

AN - SCOPUS:84891669808

SN - 9781467359818

T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

SP - 2365

EP - 2368

BT - 2013 Transducers and Eurosensors XXVII

T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -

Tao JF, Cai H, Zhang QX, Tsai JM, Kropelnicki P, Randles AB et al. Photonic thermocouple design based on an ultra-compact michelson interferometer. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 2365-2368. 6627281. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). doi: 10.1109/Transducers.2013.6627281

Photonic thermocouple design based on an ultra-compact michelson interferometer

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