Photonic micromachined tunable lasers

A. Q. Liu

Photonic micromachined tunable lasers

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

This paper covers design, fabrication, packaging and experiments of photonic Microelectromechanical Systems (MEMS) tunable laser sources. Two different types of MEMS tunable lasers, which are MEMS coupled-cavity lasers and dual-wavelength tunable lasers, are demonstrated as examples of natural synergy of MEMS with photonics. The expansion and penetration of the MEMS technology to silicon nano-photonics creates on-chip optical systems at an unprecedented scale of integration. While producing better integration, robustness and compactness, MEMS improves the functionalities and specifications of laser devices. Additionally, MEMS photonic tunable lasers are able to deliver their merits of small size, fast tuning speed, wide tuning range and CMOS compatible integration which broaden their applications to many fields.

Original language	English
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages	111-113
Number of pages	3
Publication status	Published - May 2010
Externally published	Yes
Event	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain Duration: 5 May 2010 → 7 May 2010

Publication series

Name	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Conference

Conference	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Country/Territory	Spain
City	Seville
Period	5/05/10 → 7/05/10

Keywords

MEMS
Photonics
Tunable laser

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

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title = "Photonic micromachined tunable lasers",

abstract = "This paper covers design, fabrication, packaging and experiments of photonic Microelectromechanical Systems (MEMS) tunable laser sources. Two different types of MEMS tunable lasers, which are MEMS coupled-cavity lasers and dual-wavelength tunable lasers, are demonstrated as examples of natural synergy of MEMS with photonics. The expansion and penetration of the MEMS technology to silicon nano-photonics creates on-chip optical systems at an unprecedented scale of integration. While producing better integration, robustness and compactness, MEMS improves the functionalities and specifications of laser devices. Additionally, MEMS photonic tunable lasers are able to deliver their merits of small size, fast tuning speed, wide tuning range and CMOS compatible integration which broaden their applications to many fields.",

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author = "Liu, {A. Q.}",

year = "2010",

month = may,

language = "English",

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note = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 ; Conference date: 05-05-2010 Through 07-05-2010",

}

Photonic micromachined tunable lasers. / Liu, A. Q.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. p. 111-113 5486453 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - This paper covers design, fabrication, packaging and experiments of photonic Microelectromechanical Systems (MEMS) tunable laser sources. Two different types of MEMS tunable lasers, which are MEMS coupled-cavity lasers and dual-wavelength tunable lasers, are demonstrated as examples of natural synergy of MEMS with photonics. The expansion and penetration of the MEMS technology to silicon nano-photonics creates on-chip optical systems at an unprecedented scale of integration. While producing better integration, robustness and compactness, MEMS improves the functionalities and specifications of laser devices. Additionally, MEMS photonic tunable lasers are able to deliver their merits of small size, fast tuning speed, wide tuning range and CMOS compatible integration which broaden their applications to many fields.

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BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

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Photonic micromachined tunable lasers

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

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