Photonic MEMS: From laser physics to cell biology

A. Q. Liu, Xuming Zhang

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)

Abstract

This paper reviews the recent progress from optical MEMS to photonic MEMS, nanophotonics and biophotonic MEMS, which represents a latest trend of the expansion and penetration of the MEMS technology to the nano and bio areas. Different types of devices are demonstrated as the examples of the natural synergy of MEMS with the photonics, including thermo-optic switches, tunable lasers, injection-locked laser systems, nano-photonic bandgap devices and biophotonic cell chips. The use of MEMS not only produces better integration, robustness and compactness, but also improves the functionalities and specifications of the devices.
Original languageEnglish
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages2485-2488
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: 10 Jun 200714 Jun 2007

Conference

Conference4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/TerritoryFrance
CityLyon
Period10/06/0714/06/07

Keywords

  • Biophotonics
  • MEMS
  • Photonic crystal bandgap
  • Thermo-optics

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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