Photonic MEMS: From laser physics to cell biology

A. Q. Liu; Xuming Zhang

doi:10.1109/SENSOR.2007.4300675

Photonic MEMS: From laser physics to cell biology

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

This paper reviews the recent progress from optical MEMS to photonic MEMS, nanophotonics and biophotonic MEMS, which represents a latest trend of the expansion and penetration of the MEMS technology to the nano and bio areas. Different types of devices are demonstrated as the examples of the natural synergy of MEMS with the photonics, including thermo-optic switches, tunable lasers, injection-locked laser systems, nano-photonic bandgap devices and biophotonic cell chips. The use of MEMS not only produces better integration, robustness and compactness, but also improves the functionalities and specifications of the devices.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2485-2488
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300675
Publication status	Published - 1 Dec 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

Biophotonics
MEMS
Photonic crystal bandgap
Thermo-optics

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

More information

10.1109/SENSOR.2007.4300675

Cite this

@inproceedings{809de57cfd8b4f7382c67eb595be7c28,

title = "Photonic MEMS: From laser physics to cell biology",

abstract = "This paper reviews the recent progress from optical MEMS to photonic MEMS, nanophotonics and biophotonic MEMS, which represents a latest trend of the expansion and penetration of the MEMS technology to the nano and bio areas. Different types of devices are demonstrated as the examples of the natural synergy of MEMS with the photonics, including thermo-optic switches, tunable lasers, injection-locked laser systems, nano-photonic bandgap devices and biophotonic cell chips. The use of MEMS not only produces better integration, robustness and compactness, but also improves the functionalities and specifications of the devices.",

keywords = "Biophotonics, MEMS, Photonic crystal bandgap, Thermo-optics",

author = "Liu, {A. Q.} and Xuming Zhang",

year = "2007",

month = dec,

day = "1",

doi = "10.1109/SENSOR.2007.4300675",

language = "English",

isbn = "1424408423",

pages = "2485--2488",

booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",

}

Liu, AQ & Zhang, X 2007, Photonic MEMS: From laser physics to cell biology. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300675, pp. 2485-2488, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 10/06/07. https://doi.org/10.1109/SENSOR.2007.4300675

Photonic MEMS: From laser physics to cell biology. / Liu, A. Q.; Zhang, Xuming.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2485-2488 4300675.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Photonic MEMS: From laser physics to cell biology

AU - Liu, A. Q.

AU - Zhang, Xuming

PY - 2007/12/1

Y1 - 2007/12/1

N2 - This paper reviews the recent progress from optical MEMS to photonic MEMS, nanophotonics and biophotonic MEMS, which represents a latest trend of the expansion and penetration of the MEMS technology to the nano and bio areas. Different types of devices are demonstrated as the examples of the natural synergy of MEMS with the photonics, including thermo-optic switches, tunable lasers, injection-locked laser systems, nano-photonic bandgap devices and biophotonic cell chips. The use of MEMS not only produces better integration, robustness and compactness, but also improves the functionalities and specifications of the devices.

AB - This paper reviews the recent progress from optical MEMS to photonic MEMS, nanophotonics and biophotonic MEMS, which represents a latest trend of the expansion and penetration of the MEMS technology to the nano and bio areas. Different types of devices are demonstrated as the examples of the natural synergy of MEMS with the photonics, including thermo-optic switches, tunable lasers, injection-locked laser systems, nano-photonic bandgap devices and biophotonic cell chips. The use of MEMS not only produces better integration, robustness and compactness, but also improves the functionalities and specifications of the devices.

KW - Biophotonics

KW - MEMS

KW - Photonic crystal bandgap

KW - Thermo-optics

UR - http://www.scopus.com/inward/record.url?scp=50049110220&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2007.4300675

DO - 10.1109/SENSOR.2007.4300675

M3 - Conference article published in proceeding or book

SN - 1424408423

SN - 9781424408429

SP - 2485

EP - 2488

BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07

Y2 - 10 June 2007 through 14 June 2007

ER -

Photonic MEMS: From laser physics to cell biology

Abstract

Conference

Keywords

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this