@inproceedings{5a09b8682af346749b94766558d8906d,
title = "Photonic crystal MEMS emitter for chemical gas sensing",
abstract = "A thermal emitter fabricated on complementary metal-oxide-semiconductor (CMOS)-compatible facilities is a key component for low-cost mid-infrared gas sensing. While conventional thermal emitters have broad spectrum and wide emission angle, which limit the sensing performance. In this work, a microelectromechanical system (MEMS)-based thermal emitter with photonic crystal has been designed and fabricated using CMOS-compatible technology. The photonic crystal enables the emission wavelength selectivity within mid-infrared regime. By engineering photonic crystal dimension, the emission enhancement wavelength can be matched to the fingerprint wavelength of chemical gas for efficient chemical gas sensing purpose.",
keywords = "chemical sensor, MEMS, photonic crystal, thermal emitter",
author = "Nanxi Li and Qin Chao and Zhonghua Gu and Shiwei Song and Yanyan Zhou and Shaonan Zheng and Linfang Xu and Chua, {Yun Da} and Qingxin Zhang and Hong Cai and Daohua Zhang and Wang, {Qi Jie} and Lennon Lee",
note = "Publisher Copyright: {\textcopyright} 2021 SPIE.; MOEMS and Miniaturized Systems XX 2021 ; Conference date: 06-03-2021 Through 11-03-2021",
year = "2021",
month = mar,
doi = "10.1117/12.2581358",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Hans Zappe and Wibool Piyawattanametha and Yong-Hwa Park",
booktitle = "MOEMS and Miniaturized Systems XX",
address = "United States",
}