Photonic crystal cavity embedded barium strontium titanate thin-film rib waveguide prepared by focused ion beam etching

K. L. Jim, Chi Wah Leung, H. L W Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

2 Citations (Scopus)


A photonic crystal (PC) cavity embedded Ba0.7Sr0.3TiO3(barium strontium titanate, or BST) rib waveguide, which functions as an optical filter at λ = 1550 nm, is designed using finite-difference time-domain (FDTD) simulation. The PC cavity is composed of two 5-row photonic crystal mirrors, which are formed by air holes (radii 250 nm) arranged in triangular lattice (periodicity 625 nm) in the BST matrix. Calculations suggested that the required cavity length should be 800 nm for the resonant peak to be situated at 1550 nm. Based on this design, PC cavities were fabricated on BST thin-film rib waveguides by focused ion beam etching with satisfactory results. The transmission spectra of the BST thin-film rib waveguides with PC cavities have been measured. The results agreed well with the FDTD simulation.
Original languageEnglish
JournalThin Solid Films
Issue number24 SUPPL.
Publication statusPublished - 1 Oct 2010


  • Barium strontium titanate
  • Ferroelectric thin film
  • Photonic crystal cavity
  • Rib waveguide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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