Phase-sensitive optical heterodyne interferometer for surface height measurement

Engineering

• Measurement 100%
• Reference Sample 100%
• Michelson Interferometer 100%
• Surface Height 100%
• Fluctuations 50%
• Limiting Factor 50%
• Phase Structure 50%
• Laser Beam 50%
• Phase Noise 50%
• Optical Microscope 50%
• Pathlength 50%
• Objective Lens 50%
• Surface Phase 50%
• Forming 50%
• Measurer 50%
• Demonstrates 50%
• Surfaces 50%
• Large Area 50%
• Sample Structure 50%
• Reflected Beam 50%

Physics

• Michelson Interferometer 100%
• Vibration 50%
• Laser Beams 50%
• Optics 50%
• Frequencies 50%
• Area 50%
• Shapes 50%
• Probe 50%