Phase-sensitive COMOS photo-circuit array for modulated thermoreflectance measurements

M. C. Pitter, J. Y L Goh, Michael Geoffrey Somekh, B. R. Hayes-Gill, M. Clark, S. P. Morgan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)

Abstract

An approach for the fabrication of a scalable 4×4 array of photodiodes and circuitry to make spatially resolved measurements of surface wave enhanced modulated thermoreflectance was presented. The phase sensitive detection was performed by using IQ demodulators. It was shown that the design used here could be switched between 1 kHz or 10 kHz by changing an internal capacitance.
Original languageEnglish
Pages (from-to)1339-1340
Number of pages2
JournalElectronics Letters
Volume39
Issue number18
DOIs
Publication statusPublished - 4 Sept 2003
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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