An approach for the fabrication of a scalable 4×4 array of photodiodes and circuitry to make spatially resolved measurements of surface wave enhanced modulated thermoreflectance was presented. The phase sensitive detection was performed by using IQ demodulators. It was shown that the design used here could be switched between 1 kHz or 10 kHz by changing an internal capacitance.
ASJC Scopus subject areas
- Electrical and Electronic Engineering