Phase formation in Ta-Si-N ternary system using the Gibbs free energy

P. Cao, Shu Ping Lau, B. K. Tay

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

1 Citation (Scopus)

Abstract

The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.
Original languageEnglish
Title of host publicationInternational Symposium on IC Technology, Systems and Applications
Pages315-318
Number of pages4
Publication statusPublished - 1 Dec 2001
Externally publishedYes
Event9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems - Singapore, Singapore
Duration: 3 Sep 20015 Sep 2001

Conference

Conference9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems
CountrySingapore
CitySingapore
Period3/09/015/09/01

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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