Phase formation in Ta-Si-N ternary system using the Gibbs free energy

P. Cao; Shu Ping Lau; B. K. Tay

Phase formation in Ta-Si-N ternary system using the Gibbs free energy

P. Cao, Shu Ping Lau, B. K. Tay

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

1 Citation (Scopus)

Abstract

The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.

Original language	English
Title of host publication	International Symposium on IC Technology, Systems and Applications
Pages	315-318
Number of pages	4
Publication status	Published - 1 Dec 2001
Externally published	Yes
Event	9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems - Singapore, Singapore Duration: 3 Sept 2001 → 5 Sept 2001

Conference

Conference	9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems
Country/Territory	Singapore
City	Singapore
Period	3/09/01 → 5/09/01

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

@inproceedings{57c2e1dd3913450a9d684d64dff8d8bd,

title = "Phase formation in Ta-Si-N ternary system using the Gibbs free energy",

abstract = "The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.",

author = "P. Cao and Lau, {Shu Ping} and Tay, {B. K.}",

year = "2001",

month = dec,

day = "1",

language = "English",

pages = "315--318",

booktitle = "International Symposium on IC Technology, Systems and Applications",

note = "9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems ; Conference date: 03-09-2001 Through 05-09-2001",

}

TY - GEN

T1 - Phase formation in Ta-Si-N ternary system using the Gibbs free energy

AU - Cao, P.

AU - Lau, Shu Ping

AU - Tay, B. K.

PY - 2001/12/1

Y1 - 2001/12/1

N2 - The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.

AB - The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.

UR - http://www.scopus.com/inward/record.url?scp=1842690630&partnerID=8YFLogxK

M3 - Conference article published in proceeding or book

SP - 315

EP - 318

BT - International Symposium on IC Technology, Systems and Applications

T2 - 9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems

Y2 - 3 September 2001 through 5 September 2001

ER -

Phase formation in Ta-Si-N ternary system using the Gibbs free energy

Abstract

Conference

ASJC Scopus subject areas

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