Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines

P. S. Lee, K. L. Pey, D. Mangelinck, J. Ding, D. Z. Chi, Jiyan Dai, L. Chan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

27 Citations (Scopus)

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