Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines
- P. S. Lee
- , K. L. Pey
- , D. Mangelinck
- , J. Ding
- , D. Z. Chi
- , Jiyan Dai
- , L. Chan
Research output: Journal article publication › Journal article › Academic research › peer-review
29
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(Scopus)