Oxygen-induced amorphous structure of tungsten thin films

Y. G. Shen, Y. W. Mai, W. E. McBride, D. R. McKenzie, Q. C. Zhang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

22 Citations (Scopus)

Abstract

A combination of energy-filtered electron diffraction, electron energy-loss spectroscopy, transmission electron microscopy, and x-ray diffraction are used to establish that oxygen impurities incorporated in tungsten films prepared by magnetron sputtering in the early stage of the deposition play a dominant role in the formation of an amorphous phase. Energy-filtered electron diffraction data collected from a range of amorphous films were Fourier transformed to a reduced density function (RDF) and matched with an amorphous model. The results show that better agreement with the experimental RDF is achieved if the amorphous model consists of a random continuous matrix of clusters with W3O-like symmetry.

Original languageEnglish
Pages (from-to)2211-2213
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number15
DOIs
Publication statusPublished - 11 Oct 1999
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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