Abstract
A combination of energy-filtered electron diffraction, electron energy-loss spectroscopy, transmission electron microscopy, and x-ray diffraction are used to establish that oxygen impurities incorporated in tungsten films prepared by magnetron sputtering in the early stage of the deposition play a dominant role in the formation of an amorphous phase. Energy-filtered electron diffraction data collected from a range of amorphous films were Fourier transformed to a reduced density function (RDF) and matched with an amorphous model. The results show that better agreement with the experimental RDF is achieved if the amorphous model consists of a random continuous matrix of clusters with W3O-like symmetry.
Original language | English |
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Pages (from-to) | 2211-2213 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 75 |
Issue number | 15 |
DOIs | |
Publication status | Published - 11 Oct 1999 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)