Oxygen-dependent epitaxial growth of Pt(001) thin films on MgO(001) by magnetron sputtering

X. Y. Qiu; R. X. Wang; G. Q. Li; T. Zhang; L. T. Li; M. L. Wei; X. S. Meng; H. Ji; Z. Zhang; C. H. Chan; Jiyan Dai

doi:10.1016/j.apsusc.2017.02.168

Oxygen-dependent epitaxial growth of Pt(001) thin films on MgO(001) by magnetron sputtering

X. Y. Qiu, R. X. Wang, G. Q. Li, T. Zhang, L. T. Li, M. L. Wei, X. S. Meng, H. Ji, Z. Zhang, C. H. Chan, Jiyan Dai

Research output: Journal article publication › Journal article › Academic research › peer-review

10 Citations (Scopus)

Abstract

The roles of oxygen gas in crystal orientation, surface morphology and electrical resistivity of Pt thin films grown on MgO(001) substrate by magnetron sputtering are studied. With a well-controlled oxygen ratio (15% oxygen) during sputtering deposition with Ar-O2mixture ambient, (001) epitaxial growth of Pt film on MgO substrate is achieved with an epitaxial orientation relationship of (001)Pt//(001)MgO and [100]Pt//[100]MgO. Microstructural and electrical characterizations reveal that the (001) Pt thin films possess very smooth surface and good conductivity. The formation and subsequent decomposition of platinum oxides in the Pt films grown with more than 30% oxygen result in an increase of surface roughness and electrical resistivity. The high-quality Pt(001) film has large potential for integrated electronic device applications.

Original language	English
Pages (from-to)	212-217
Number of pages	6
Journal	Applied Surface Science
Volume	406
DOIs	https://doi.org/10.1016/j.apsusc.2017.02.168
Publication status	Published - 1 Jun 2017

Keywords

Epitaxial growth
Microstructure
Oxygen ratio
Pt film

ASJC Scopus subject areas

Surfaces, Coatings and Films

More information

10.1016/j.apsusc.2017.02.168

http://hdl.handle.net/10397/100399

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title = "Oxygen-dependent epitaxial growth of Pt(001) thin films on MgO(001) by magnetron sputtering",

abstract = "The roles of oxygen gas in crystal orientation, surface morphology and electrical resistivity of Pt thin films grown on MgO(001) substrate by magnetron sputtering are studied. With a well-controlled oxygen ratio (15% oxygen) during sputtering deposition with Ar-O2mixture ambient, (001) epitaxial growth of Pt film on MgO substrate is achieved with an epitaxial orientation relationship of (001)Pt//(001)MgO and [100]Pt//[100]MgO. Microstructural and electrical characterizations reveal that the (001) Pt thin films possess very smooth surface and good conductivity. The formation and subsequent decomposition of platinum oxides in the Pt films grown with more than 30% oxygen result in an increase of surface roughness and electrical resistivity. The high-quality Pt(001) film has large potential for integrated electronic device applications.",

keywords = "Epitaxial growth, Microstructure, Oxygen ratio, Pt film",

author = "Qiu, {X. Y.} and Wang, {R. X.} and Li, {G. Q.} and T. Zhang and Li, {L. T.} and Wei, {M. L.} and Meng, {X. S.} and H. Ji and Z. Zhang and Chan, {C. H.} and Jiyan Dai",

year = "2017",

month = jun,

day = "1",

doi = "10.1016/j.apsusc.2017.02.168",

language = "English",

volume = "406",

pages = "212--217",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

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TY - JOUR

T1 - Oxygen-dependent epitaxial growth of Pt(001) thin films on MgO(001) by magnetron sputtering

AU - Qiu, X. Y.

AU - Wang, R. X.

AU - Li, G. Q.

AU - Zhang, T.

AU - Li, L. T.

AU - Wei, M. L.

AU - Meng, X. S.

AU - Ji, H.

AU - Zhang, Z.

AU - Chan, C. H.

AU - Dai, Jiyan

PY - 2017/6/1

Y1 - 2017/6/1

N2 - The roles of oxygen gas in crystal orientation, surface morphology and electrical resistivity of Pt thin films grown on MgO(001) substrate by magnetron sputtering are studied. With a well-controlled oxygen ratio (15% oxygen) during sputtering deposition with Ar-O2mixture ambient, (001) epitaxial growth of Pt film on MgO substrate is achieved with an epitaxial orientation relationship of (001)Pt//(001)MgO and [100]Pt//[100]MgO. Microstructural and electrical characterizations reveal that the (001) Pt thin films possess very smooth surface and good conductivity. The formation and subsequent decomposition of platinum oxides in the Pt films grown with more than 30% oxygen result in an increase of surface roughness and electrical resistivity. The high-quality Pt(001) film has large potential for integrated electronic device applications.

AB - The roles of oxygen gas in crystal orientation, surface morphology and electrical resistivity of Pt thin films grown on MgO(001) substrate by magnetron sputtering are studied. With a well-controlled oxygen ratio (15% oxygen) during sputtering deposition with Ar-O2mixture ambient, (001) epitaxial growth of Pt film on MgO substrate is achieved with an epitaxial orientation relationship of (001)Pt//(001)MgO and [100]Pt//[100]MgO. Microstructural and electrical characterizations reveal that the (001) Pt thin films possess very smooth surface and good conductivity. The formation and subsequent decomposition of platinum oxides in the Pt films grown with more than 30% oxygen result in an increase of surface roughness and electrical resistivity. The high-quality Pt(001) film has large potential for integrated electronic device applications.

KW - Epitaxial growth

KW - Microstructure

KW - Oxygen ratio

KW - Pt film

UR - http://www.scopus.com/inward/record.url?scp=85013857544&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2017.02.168

DO - 10.1016/j.apsusc.2017.02.168

M3 - Journal article

SN - 0169-4332

VL - 406

SP - 212

EP - 217

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Oxygen-dependent epitaxial growth of Pt(001) thin films on MgO(001) by magnetron sputtering

Abstract

Keywords

ASJC Scopus subject areas

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