Optimum instrumentation of a tapping mode, non-optically regulated near-field scanning optical microscope and its applications

Nien Hua Lu, Yu Min Chang, Din Ping Tsai

Research output: Journal article publicationConference articleAcademic researchpeer-review


We describe the optimum design of the near-field scanning optical microscope (NSOM) based on a short probe tapping mode tuning-fork (TMTF) configuration and its applications in optoelectronic characterization and optical measurements. The short probe TMTF-NSOM is constructed to operate both in collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as the light collector/emitter as well as the force sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged by collection mode. On the other hand, excitation mode of short probe TMTF-NSOM is applied to perform near-field surface photovoltage measurements on AlGaInP light emitting diode structures.

Original languageEnglish
Article number58580W
Pages (from-to)1-7
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Jun 2005
Externally publishedYes
EventNano- and Micro-Metrology - Munich, Germany
Duration: 16 Jun 200517 Jun 2005


  • Evanescent field
  • Near-field scanning optical microscope
  • Short probe
  • Surface photovoltage
  • Tapping-mode
  • Total internal reflection
  • Tuning fork

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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