Optimum design and development of an XY flexure micromanipulator for micro scale positioning

Yangmin Li; Qingsong Xu

doi:10.1109/ROBOT.2008.4543684

Optimum design and development of an XY flexure micromanipulator for micro scale positioning

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

4 Citations (Scopus)

Abstract

This paper presents the design and development procedures of a new decoupled XY micromanipulator for micro scale positioning applications. The manipulator is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on the lumped model, the efficient models for kinematics, statics and dynamics of the XY stage have been obtained, which are verified by resorting to the finite element analysis via ANSYS software package. Moreover, the stage dimensions are optimized through the particle swarm optimization (PSO) approach, and a manipulator with performances satisfying the requirements is generated. Furthermore, a prototype of the manipulator has been fabricated via the wire-EDM process. The developed micromanipulator is expected to be adopted in practical applications.

Original language	English
Title of host publication	2008 IEEE International Conference on Robotics and Automation, ICRA 2008
Pages	3112-3117
Number of pages	6
DOIs	https://doi.org/10.1109/ROBOT.2008.4543684
Publication status	Published - 18 Sep 2008
Externally published	Yes
Event	2008 IEEE International Conference on Robotics and Automation, ICRA 2008 - Pasadena, CA, United States Duration: 19 May 2008 → 23 May 2008

Conference

Conference	2008 IEEE International Conference on Robotics and Automation, ICRA 2008
Country/Territory	United States
City	Pasadena, CA
Period	19/05/08 → 23/05/08

Keywords

Flexure mechanisms
Micro-positioning stages
Optimal design
Parallel robots

ASJC Scopus subject areas

Software
Control and Systems Engineering

More information

10.1109/ROBOT.2008.4543684

Cite this

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title = "Optimum design and development of an XY flexure micromanipulator for micro scale positioning",

abstract = "This paper presents the design and development procedures of a new decoupled XY micromanipulator for micro scale positioning applications. The manipulator is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on the lumped model, the efficient models for kinematics, statics and dynamics of the XY stage have been obtained, which are verified by resorting to the finite element analysis via ANSYS software package. Moreover, the stage dimensions are optimized through the particle swarm optimization (PSO) approach, and a manipulator with performances satisfying the requirements is generated. Furthermore, a prototype of the manipulator has been fabricated via the wire-EDM process. The developed micromanipulator is expected to be adopted in practical applications.",

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Li, Y & Xu, Q 2008, Optimum design and development of an XY flexure micromanipulator for micro scale positioning. in 2008 IEEE International Conference on Robotics and Automation, ICRA 2008., 4543684, pp. 3112-3117, 2008 IEEE International Conference on Robotics and Automation, ICRA 2008, Pasadena, CA, United States, 19/05/08. https://doi.org/10.1109/ROBOT.2008.4543684

Optimum design and development of an XY flexure micromanipulator for micro scale positioning. / Li, Yangmin; Xu, Qingsong.

2008 IEEE International Conference on Robotics and Automation, ICRA 2008. 2008. p. 3112-3117 4543684.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

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AU - Li, Yangmin

AU - Xu, Qingsong

PY - 2008/9/18

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N2 - This paper presents the design and development procedures of a new decoupled XY micromanipulator for micro scale positioning applications. The manipulator is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on the lumped model, the efficient models for kinematics, statics and dynamics of the XY stage have been obtained, which are verified by resorting to the finite element analysis via ANSYS software package. Moreover, the stage dimensions are optimized through the particle swarm optimization (PSO) approach, and a manipulator with performances satisfying the requirements is generated. Furthermore, a prototype of the manipulator has been fabricated via the wire-EDM process. The developed micromanipulator is expected to be adopted in practical applications.

AB - This paper presents the design and development procedures of a new decoupled XY micromanipulator for micro scale positioning applications. The manipulator is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on the lumped model, the efficient models for kinematics, statics and dynamics of the XY stage have been obtained, which are verified by resorting to the finite element analysis via ANSYS software package. Moreover, the stage dimensions are optimized through the particle swarm optimization (PSO) approach, and a manipulator with performances satisfying the requirements is generated. Furthermore, a prototype of the manipulator has been fabricated via the wire-EDM process. The developed micromanipulator is expected to be adopted in practical applications.

KW - Flexure mechanisms

KW - Micro-positioning stages

KW - Optimal design

KW - Parallel robots

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BT - 2008 IEEE International Conference on Robotics and Automation, ICRA 2008

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Y2 - 19 May 2008 through 23 May 2008

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Optimum design and development of an XY flexure micromanipulator for micro scale positioning

Abstract

Conference

Keywords

ASJC Scopus subject areas

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