Optimum design and development of an XY flexure micromanipulator for micro scale positioning

Yangmin Li, Qingsong Xu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

This paper presents the design and development procedures of a new decoupled XY micromanipulator for micro scale positioning applications. The manipulator is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on the lumped model, the efficient models for kinematics, statics and dynamics of the XY stage have been obtained, which are verified by resorting to the finite element analysis via ANSYS software package. Moreover, the stage dimensions are optimized through the particle swarm optimization (PSO) approach, and a manipulator with performances satisfying the requirements is generated. Furthermore, a prototype of the manipulator has been fabricated via the wire-EDM process. The developed micromanipulator is expected to be adopted in practical applications.
Original languageEnglish
Title of host publication2008 IEEE International Conference on Robotics and Automation, ICRA 2008
Pages3112-3117
Number of pages6
DOIs
Publication statusPublished - 18 Sep 2008
Externally publishedYes
Event2008 IEEE International Conference on Robotics and Automation, ICRA 2008 - Pasadena, CA, United States
Duration: 19 May 200823 May 2008

Conference

Conference2008 IEEE International Conference on Robotics and Automation, ICRA 2008
Country/TerritoryUnited States
CityPasadena, CA
Period19/05/0823/05/08

Keywords

  • Flexure mechanisms
  • Micro-positioning stages
  • Optimal design
  • Parallel robots

ASJC Scopus subject areas

  • Software
  • Control and Systems Engineering

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