@inproceedings{0b40a026cc284496bf9bef7d9fb394e2,
title = "Optimizing TiN coating surface roughness with RSM",
abstract = "This paper presents using Response Surface Method (RSM) to optimize average surface roughness (Ra) of titanium nitride (TiN) coating. The Cathodic Arc Physical Vapor Deposition (CAPVD) technique was used to produce the coating which is mainly used to deposit on cutting tools and molds. To optimize the Ravalue, RSM was aimed to obtain the best parameter settings. Surface profilometer was used to analyze the coating roughness for the following factors: bias voltage (Vb), nitrogen (N2) pressure (P). To conclude, when Vb = -115V and N2pressure = 9.54 × 10 E-03, the Ravalue could be optimized at 0.23μm.",
keywords = "Optimization, PVD coating, Response surface method, Roughness, Titanium nitride",
author = "Yim, {S. L.} and Yu, {Kai Ming} and Chan, {Luen Chow} and D. Kwok and Lee, {T. C.}",
year = "2006",
month = dec,
day = "1",
language = "English",
isbn = "0878494219",
series = "Materials Science Forum",
pages = "424--427",
booktitle = "Advances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China",
note = "12th International Manufacturing Conference in China, IMCC2006 ; Conference date: 21-09-2006 Through 23-09-2006",
}