Optimizing TiN coating surface roughness with RSM

S. L. Yim, Kai Ming Yu, Luen Chow Chan, D. Kwok, T. C. Lee

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


This paper presents using Response Surface Method (RSM) to optimize average surface roughness (Ra) of titanium nitride (TiN) coating. The Cathodic Arc Physical Vapor Deposition (CAPVD) technique was used to produce the coating which is mainly used to deposit on cutting tools and molds. To optimize the Ravalue, RSM was aimed to obtain the best parameter settings. Surface profilometer was used to analyze the coating roughness for the following factors: bias voltage (Vb), nitrogen (N2) pressure (P). To conclude, when Vb = -115V and N2pressure = 9.54 × 10 E-03, the Ravalue could be optimized at 0.23μm.
Original languageEnglish
Title of host publicationAdvances in Materials Manufacturing Science and Technology II - Selected Papers from the 12th International Manufacturing Conference in China
Number of pages4
Publication statusPublished - 1 Dec 2006
Event12th International Manufacturing Conference in China, IMCC2006 - Xi'an, China
Duration: 21 Sept 200623 Sept 2006

Publication series

NameMaterials Science Forum
ISSN (Print)0255-5476


Conference12th International Manufacturing Conference in China, IMCC2006


  • Optimization
  • PVD coating
  • Response surface method
  • Roughness
  • Titanium nitride

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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