Optimization of design and fabrication for micromachined true time delay (TTD) phase shifters

W. Palei, A. Q. Liu, A. B. Yu, Arokiaswami Alphones, Y. H. Lee

Research output: Journal article publicationJournal articleAcademic researchpeer-review

16 Citations (Scopus)

Abstract

Distributed techniques have been widely employed as a solution to obtain wide band circuits at microwave and millimeter wave band. This paper presents five different designs for true-time delay (TTD) phase shifters that are based on characteristic impedance of 75, 65 and 50 Ω coplanar waveguide (CPW) distributed microelectromechanical systems (MEMS) transmission line (DMTL), which are loaded with different designs and number of shunt capacitive switches. The TTD phase shifters are fabricated on a 675 μm high resistivity silicon (Si) wafer using surface micromachining process. The design operates up to Ku band with a measured return loss below -15 dB and an average loss of 2.3 dB/phase shift of 250° at 20 GHz. The TTD phase shifters have wide applications for high-performance of microwave and millimeter-wave integrated circuits.

Original languageEnglish
Pages (from-to)446-454
Number of pages9
JournalSensors and Actuators, A: Physical
Volume119
Issue number2
DOIs
Publication statusPublished - 13 Apr 2005
Externally publishedYes

Keywords

  • Capacitive shunt switch
  • Distributed MEMS transmission line (DMTL)
  • MEMS
  • Radio frequency (RF)
  • True time delay (TTD) phase shifter

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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