Abstract
Distributed techniques have been widely employed as a solution to obtain wide band circuits at microwave and millimeter wave band. This paper presents five different designs for true-time delay (TTD) phase shifters that are based on characteristic impedance of 75, 65 and 50 Ω coplanar waveguide (CPW) distributed microelectromechanical systems (MEMS) transmission line (DMTL), which are loaded with different designs and number of shunt capacitive switches. The TTD phase shifters are fabricated on a 675 μm high resistivity silicon (Si) wafer using surface micromachining process. The design operates up to Ku band with a measured return loss below -15 dB and an average loss of 2.3 dB/phase shift of 250° at 20 GHz. The TTD phase shifters have wide applications for high-performance of microwave and millimeter-wave integrated circuits.
Original language | English |
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Pages (from-to) | 446-454 |
Number of pages | 9 |
Journal | Sensors and Actuators, A: Physical |
Volume | 119 |
Issue number | 2 |
DOIs | |
Publication status | Published - 13 Apr 2005 |
Externally published | Yes |
Keywords
- Capacitive shunt switch
- Distributed MEMS transmission line (DMTL)
- MEMS
- Radio frequency (RF)
- True time delay (TTD) phase shifter
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering