Optimization of Biosensing Microcantilever Devices

Xuan Zhang, Mo Yang, Cengiz S. Ozkan

Research output: Journal article publicationConference articleAcademic researchpeer-review


Optimization of piezoresistive microcantilevers for biosensing applications has been studied using finite element analysis. Models have been described for predicting the static behavior of cantilevers with elastic and piezoresistive layers for analyte-receptor binding. The high-sensitivity cantilevers can be used to detect changes in surface stress due to the binding and hybridization of biomolecules. Chemo-mechanical binding forces have been analyzed to understand the issues of saturation over the cantilever surface. The introduction of stress concentration regions during cantilever fabrication has also been discussed which enhances the detection sensitivity through increased surface stress.
Original languageEnglish
Pages (from-to)135-141
Number of pages7
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 1 Dec 2003
Externally publishedYes
EventBiomicroelectromechanical Systems (BioMEMS) - San Francisco, CA, United States
Duration: 22 Apr 200325 Apr 2003

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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