Optimization of a completely decoupled flexure-based parallel XY micro-motion stage

Jiming Huang, Yangmin Li, Xinhua Zhao

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

9 Citations (Scopus)

Abstract

This paper presents a completely decoupled XY micro-motion stage which is a compliant parallel mechanism based on flexure hinges and driven by piezoelectric actuators (PZT). Simplified matrix method is employed to derive the compliance model. Then the workspace is analyzed by considering the output reduction of PZT, stress in the flexure hinges and buckling phenomenon. Finally, the stage dimensions are optimized using particle swarm optimization (PSO) algorithm in order to achieve maximum natural frequencies, and finite element analysis (FEA) is carried out to simulate the performance of the optimized stage. The FEA result indicates that the XY stage has an ideal decoupling property.
Original languageEnglish
Title of host publication2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Pages69-74
Number of pages6
DOIs
Publication statusPublished - 17 Nov 2011
Externally publishedYes
Event2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China
Duration: 7 Aug 201110 Aug 2011

Conference

Conference2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Country/TerritoryChina
CityBeijing
Period7/08/1110/08/11

ASJC Scopus subject areas

  • Artificial Intelligence
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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