Optimization of a completely decoupled flexure-based parallel XY micro-motion stage

Jiming Huang; Yangmin Li; Xinhua Zhao

doi:10.1109/ICMA.2011.5985633

Optimization of a completely decoupled flexure-based parallel XY micro-motion stage

Jiming Huang, Yangmin Li, Xinhua Zhao

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

11 Citations (Scopus)

Abstract

This paper presents a completely decoupled XY micro-motion stage which is a compliant parallel mechanism based on flexure hinges and driven by piezoelectric actuators (PZT). Simplified matrix method is employed to derive the compliance model. Then the workspace is analyzed by considering the output reduction of PZT, stress in the flexure hinges and buckling phenomenon. Finally, the stage dimensions are optimized using particle swarm optimization (PSO) algorithm in order to achieve maximum natural frequencies, and finite element analysis (FEA) is carried out to simulate the performance of the optimized stage. The FEA result indicates that the XY stage has an ideal decoupling property.

Original language	English
Title of host publication	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Pages	69-74
Number of pages	6
DOIs	https://doi.org/10.1109/ICMA.2011.5985633
Publication status	Published - 17 Nov 2011
Externally published	Yes
Event	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011 - Beijing, China Duration: 7 Aug 2011 → 10 Aug 2011

Conference

Conference	2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011
Country/Territory	China
City	Beijing
Period	7/08/11 → 10/08/11

ASJC Scopus subject areas

Artificial Intelligence
Electrical and Electronic Engineering
Mechanical Engineering

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10.1109/ICMA.2011.5985633

Cite this

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title = "Optimization of a completely decoupled flexure-based parallel XY micro-motion stage",

abstract = "This paper presents a completely decoupled XY micro-motion stage which is a compliant parallel mechanism based on flexure hinges and driven by piezoelectric actuators (PZT). Simplified matrix method is employed to derive the compliance model. Then the workspace is analyzed by considering the output reduction of PZT, stress in the flexure hinges and buckling phenomenon. Finally, the stage dimensions are optimized using particle swarm optimization (PSO) algorithm in order to achieve maximum natural frequencies, and finite element analysis (FEA) is carried out to simulate the performance of the optimized stage. The FEA result indicates that the XY stage has an ideal decoupling property.",

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Optimization of a completely decoupled flexure-based parallel XY micro-motion stage. / Huang, Jiming; Li, Yangmin; Zhao, Xinhua.
2011 IEEE International Conference on Mechatronics and Automation, ICMA 2011. 2011. p. 69-74 5985633.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - This paper presents a completely decoupled XY micro-motion stage which is a compliant parallel mechanism based on flexure hinges and driven by piezoelectric actuators (PZT). Simplified matrix method is employed to derive the compliance model. Then the workspace is analyzed by considering the output reduction of PZT, stress in the flexure hinges and buckling phenomenon. Finally, the stage dimensions are optimized using particle swarm optimization (PSO) algorithm in order to achieve maximum natural frequencies, and finite element analysis (FEA) is carried out to simulate the performance of the optimized stage. The FEA result indicates that the XY stage has an ideal decoupling property.

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Optimization of a completely decoupled flexure-based parallel XY micro-motion stage

Abstract

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ASJC Scopus subject areas

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