Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning

Hui Tang; Yangmin Li

doi:10.1109/IROS.2012.6385839

Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

8 Citations (Scopus)

Abstract

A compliant 2-DOF nanopositioning stage with a novel concept of dual-mode driven is proposed in this paper aiming to improve the scanning performance of the Atomic Force Microscope (AFM). The stage is featured with nanoscale positioning precision, high bandwidth, long scanning range and fully decoupled structure, which can be selected to work in dual working modes. Based upon the matrix method, the discussions in terms of output compliance, input stiffness and dynamics modeling via Lagrange equation have been performed in detail. Moreover, a series of optimal designs have been implemented using Particle Swarm Optimization (PSO) algorithm. The results of the finite-element analysis (FEA) indicate that the first natural frequency is approximated 583 Hz, the amplification ratio in two axes is about 4, thus the maximum scanning range can reach up to around 341 μm × 341 μm without material failure, while the cross-coupling between the two axes is kept within 2%. All the results indicate that the presented mechanism possesses a good performance for high-rate AFM scanning.

Original language	English
Title of host publication	2012 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2012
Pages	658-663
Number of pages	6
DOIs	https://doi.org/10.1109/IROS.2012.6385839
Publication status	Published - 1 Dec 2012
Externally published	Yes
Event	25th IEEE/RSJ International Conference on Robotics and Intelligent Systems, IROS 2012 - Vilamoura, Algarve, Portugal Duration: 7 Oct 2012 → 12 Oct 2012

Conference

Conference	25th IEEE/RSJ International Conference on Robotics and Intelligent Systems, IROS 2012
Country/Territory	Portugal
City	Vilamoura, Algarve
Period	7/10/12 → 12/10/12

ASJC Scopus subject areas

Control and Systems Engineering
Software
Computer Vision and Pattern Recognition
Computer Science Applications

More information

10.1109/IROS.2012.6385839

Cite this

@inproceedings{15c7023ff99640519156ea0c4fcf8dd4,

title = "Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning",

abstract = "A compliant 2-DOF nanopositioning stage with a novel concept of dual-mode driven is proposed in this paper aiming to improve the scanning performance of the Atomic Force Microscope (AFM). The stage is featured with nanoscale positioning precision, high bandwidth, long scanning range and fully decoupled structure, which can be selected to work in dual working modes. Based upon the matrix method, the discussions in terms of output compliance, input stiffness and dynamics modeling via Lagrange equation have been performed in detail. Moreover, a series of optimal designs have been implemented using Particle Swarm Optimization (PSO) algorithm. The results of the finite-element analysis (FEA) indicate that the first natural frequency is approximated 583 Hz, the amplification ratio in two axes is about 4, thus the maximum scanning range can reach up to around 341 μm × 341 μm without material failure, while the cross-coupling between the two axes is kept within 2%. All the results indicate that the presented mechanism possesses a good performance for high-rate AFM scanning.",

author = "Hui Tang and Yangmin Li",

year = "2012",

month = dec,

day = "1",

doi = "10.1109/IROS.2012.6385839",

language = "English",

isbn = "9781467317375",

pages = "658--663",

booktitle = "2012 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2012",

note = "25th IEEE/RSJ International Conference on Robotics and Intelligent Systems, IROS 2012 ; Conference date: 07-10-2012 Through 12-10-2012",

}

Tang, H & Li, Y 2012, Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning. in 2012 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2012., 6385839, pp. 658-663, 25th IEEE/RSJ International Conference on Robotics and Intelligent Systems, IROS 2012, Vilamoura, Algarve, Portugal, 7/10/12. https://doi.org/10.1109/IROS.2012.6385839

Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning. / Tang, Hui; Li, Yangmin.
2012 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2012. 2012. p. 658-663 6385839.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning

AU - Tang, Hui

AU - Li, Yangmin

PY - 2012/12/1

Y1 - 2012/12/1

N2 - A compliant 2-DOF nanopositioning stage with a novel concept of dual-mode driven is proposed in this paper aiming to improve the scanning performance of the Atomic Force Microscope (AFM). The stage is featured with nanoscale positioning precision, high bandwidth, long scanning range and fully decoupled structure, which can be selected to work in dual working modes. Based upon the matrix method, the discussions in terms of output compliance, input stiffness and dynamics modeling via Lagrange equation have been performed in detail. Moreover, a series of optimal designs have been implemented using Particle Swarm Optimization (PSO) algorithm. The results of the finite-element analysis (FEA) indicate that the first natural frequency is approximated 583 Hz, the amplification ratio in two axes is about 4, thus the maximum scanning range can reach up to around 341 μm × 341 μm without material failure, while the cross-coupling between the two axes is kept within 2%. All the results indicate that the presented mechanism possesses a good performance for high-rate AFM scanning.

AB - A compliant 2-DOF nanopositioning stage with a novel concept of dual-mode driven is proposed in this paper aiming to improve the scanning performance of the Atomic Force Microscope (AFM). The stage is featured with nanoscale positioning precision, high bandwidth, long scanning range and fully decoupled structure, which can be selected to work in dual working modes. Based upon the matrix method, the discussions in terms of output compliance, input stiffness and dynamics modeling via Lagrange equation have been performed in detail. Moreover, a series of optimal designs have been implemented using Particle Swarm Optimization (PSO) algorithm. The results of the finite-element analysis (FEA) indicate that the first natural frequency is approximated 583 Hz, the amplification ratio in two axes is about 4, thus the maximum scanning range can reach up to around 341 μm × 341 μm without material failure, while the cross-coupling between the two axes is kept within 2%. All the results indicate that the presented mechanism possesses a good performance for high-rate AFM scanning.

UR - http://www.scopus.com/inward/record.url?scp=84872344052&partnerID=8YFLogxK

U2 - 10.1109/IROS.2012.6385839

DO - 10.1109/IROS.2012.6385839

M3 - Conference article published in proceeding or book

SN - 9781467317375

SP - 658

EP - 663

BT - 2012 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2012

T2 - 25th IEEE/RSJ International Conference on Robotics and Intelligent Systems, IROS 2012

Y2 - 7 October 2012 through 12 October 2012

ER -

Optimal design, modeling and analysis of a 2-DOF nanopositioning stage with dual-mode: Towards High-Rate AFM scanning

Abstract

Conference

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this