Optimal design and fabrication of a piezoactuated flexure XYZ parallel micropositioning stage

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

11 Citations (Scopus)

Abstract

This paper presents the design and fabrication process of a new piezoelectrically actuated flexure-based XYZ compliant parallel-kinematics micropositioning stage with totally decoupled properties. The proposed XYZ stage consists of three limbs which are assembled in an orthogonal manner, and it has both input and output decoupling properties. Analytical models for kinematics, statics, and dynamics of the XYZ stage are established, which are validated by finite element analysis performed with ANSYS. Based on the derived models, architectural parameters of the stage are optimized and a prototype is developed for experimental studies. The results not only verify the effectiveness of the conducted optimum design but also confirm the well-decoupled performance of the XYZ stage, which will be used to execute micro-/nanomanipulation tasks.
Original languageEnglish
Title of host publicationIEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010 - Conference Proceedings
Pages3682-3687
Number of pages6
DOIs
Publication statusPublished - 1 Dec 2010
Externally publishedYes
Event23rd IEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010 - Taipei, Taiwan
Duration: 18 Oct 201022 Oct 2010

Conference

Conference23rd IEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010
Country/TerritoryTaiwan
CityTaipei
Period18/10/1022/10/10

ASJC Scopus subject areas

  • Artificial Intelligence
  • Human-Computer Interaction
  • Control and Systems Engineering

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