Abstract
This paper presents the design and fabrication process of a new piezoelectrically actuated flexure-based XYZ compliant parallel-kinematics micropositioning stage with totally decoupled properties. The proposed XYZ stage consists of three limbs which are assembled in an orthogonal manner, and it has both input and output decoupling properties. Analytical models for kinematics, statics, and dynamics of the XYZ stage are established, which are validated by finite element analysis performed with ANSYS. Based on the derived models, architectural parameters of the stage are optimized and a prototype is developed for experimental studies. The results not only verify the effectiveness of the conducted optimum design but also confirm the well-decoupled performance of the XYZ stage, which will be used to execute micro-/nanomanipulation tasks.
Original language | English |
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Title of host publication | IEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010 - Conference Proceedings |
Pages | 3682-3687 |
Number of pages | 6 |
DOIs | |
Publication status | Published - 1 Dec 2010 |
Externally published | Yes |
Event | 23rd IEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010 - Taipei, Taiwan Duration: 18 Oct 2010 → 22 Oct 2010 |
Conference
Conference | 23rd IEEE/RSJ 2010 International Conference on Intelligent Robots and Systems, IROS 2010 |
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Country/Territory | Taiwan |
City | Taipei |
Period | 18/10/10 → 22/10/10 |
ASJC Scopus subject areas
- Artificial Intelligence
- Human-Computer Interaction
- Control and Systems Engineering