Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Mian Yao; Jushuai Wu; Aping Zhang; Hwa Yaw Tam; Ping Kong Alexander Wai

doi:10.1109/JSEN.2017.2737551

Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Mian Yao
, Jushuai Wu
, Aping Zhang
, Hwa Yaw Tam
, Ping Kong Alexander Wai

The Hong Kong Polytechnic University

Research output: Journal article publication › Journal article › Academic research › peer-review

10 Citations (Scopus)

Abstract

We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

Original language	English
Article number	8004427
Pages (from-to)	7257-7261
Number of pages	5
Journal	IEEE Sensors Journal
Volume	17
Issue number	22
DOIs	https://doi.org/10.1109/JSEN.2017.2737551
Publication status	Published - 15 Nov 2017

Keywords

3D printed sensor
Optical microfabrication
suspended-mirror device

ASJC Scopus subject areas

Instrumentation
Electrical and Electronic Engineering

More information

10.1109/JSEN.2017.2737551

http://hdl.handle.net/10397/100588

Cite this

@article{2973deac51cd428eae2f02542efd9d55,

title = "Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices",

abstract = "We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.",

keywords = "3D printed sensor, Optical microfabrication, suspended-mirror device",

author = "Mian Yao and Jushuai Wu and Aping Zhang and Tam, \{Hwa Yaw\} and Wai, \{Ping Kong Alexander\}",

year = "2017",

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T1 - Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

AU - Yao, Mian

AU - Wu, Jushuai

AU - Zhang, Aping

AU - Tam, Hwa Yaw

AU - Wai, Ping Kong Alexander

PY - 2017/11/15

Y1 - 2017/11/15

N2 - We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

AB - We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

KW - 3D printed sensor

KW - Optical microfabrication

KW - suspended-mirror device

UR - https://www.scopus.com/pages/publications/85029009339

U2 - 10.1109/JSEN.2017.2737551

DO - 10.1109/JSEN.2017.2737551

M3 - Journal article

SN - 1530-437X

VL - 17

SP - 7257

EP - 7261

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 22

M1 - 8004427

ER -

Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Abstract

Keywords

ASJC Scopus subject areas

More information

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