TY - JOUR
T1 - Optically 3-D μ -Printed Ferrule-Top Polymer Suspended-Mirror Devices
AU - Yao, Mian
AU - Wai, Ping Kong Alexander
AU - Wu, Jushuai
AU - Zhang, Aping
AU - Tam, Hwayaw
PY - 2016/10/1
Y1 - 2016/10/1
N2 - We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.
AB - We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.
U2 - 10.1109/ICSENS.2016.7808491
DO - 10.1109/ICSENS.2016.7808491
M3 - Journal article
SN - 1530-437X
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
ER -