Optically 3-D μ -Printed Ferrule-Top Polymer Suspended-Mirror Devices

Mian Yao, Ping Kong Alexander Wai, Jushuai Wu, Aping Zhang, Hwayaw Tam

Research output: Journal article publicationJournal articleAcademic researchpeer-review


We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.
Original languageEnglish
JournalIEEE Sensors Journal
Publication statusPublished - 1 Oct 2016


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